Characteristics of Diamond-Like Carbon Films Fabricated by Using a Filtered Vacuum Arc System for Dye-Sensitized Solar Cells

摘要： Dye-sensitized solar cells (DSSC) based on diamond-like carbon (DLC) anti-re?ection coating (ARC) thin ?lms are investigated. The DLC ?lm was proposed to improve the cell performance of DSSC devices. In this work, the DLC ?lms were fabricated by using the FVA (?ltered vacuum arc) method, the structural, optical, and physical properties of the fabricated DLC ?lms with various ?lm thicknesses were experimentally investigated. All DLC ?lms showed smoother and more uniform surfaces with increasing ?lm thickness. Furthermore, the values of rms surface roughness, friction coe?cient, the refractive index, and the absorption coe?cient increased with increasing ?lm thickness, the hardness and the elastic modulus of the DLC ?lms were improved. These results are associated with the increased sp3 contents in the amorphous carbon ?lm due to the e?ects of the energetic ion bombardment during ?lm deposition.