[Micro/Nano Technologies] Micro and Nano Fabrication Technology Volume 1 || Micro Milling for Functional Surface

摘要： Micro manufacturing has recently increased in the several ?elds that include optics, electronics, medicine, biotechnology, and communications. Then, drastic progresses have been seen in the micro milling with the technologies in micro/nano-scale measurement, control, and tooling. This chapter describes the micro milling for manufacturing of the functional surfaces, which control material behavior with the surface topography. In the introduction, the current technical status in the functional surfaces is reviewed with the micro fabrication processes, and some issues in the micro milling are described to achieve high qualities of the micro elements and structures on the surfaces. Then, the typical micro milling process is discussed in terms of the operations and the removal process. Regarding material behavior, the effect of crystal grain size and orientation on the removal process becomes relatively large. When the grain size reduces, the dynamic components in the cutting force, burr formation, and affected layer can be controlled in micro cutting. Micro milling is applied to manufacture the functional surfaces with the micro dimples at high machining rates. The micro dimples are machined in milling with the inclined spindle at 45(cid:1). The milling with the cutter axis inclination is also applied to machine the micro dimples on the cylinder surfaces. A mechanistic model is applied to control the dimple shape for the cutting parameters, the feed direction, and the tool geometry. The surfaces with the micro dimples are applied to control the surface functions such as optical re?ection and wettability.