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[IEEE 2018 International Wafer Level Packaging Conference (IWLPC) - San Jose, CA, USA (2018.10.23-2018.10.25)] 2018 International Wafer Level Packaging Conference (IWLPC) - Development of Low Temperature Direct Bond Interconnect Technology for Die-To-Wafer and Die-To-Die Applications-Stacking, Yield Improvement, Reliability Assessment
摘要： The Direct Bond Interconnect technology (DBI), commonly referred to as low temperature hybrid bonding, is an attractive bonding technology with the potential of much finer pitch and higher throughput than any solder based microbump bonding. Dielectric bonding takes place at ambient temperatures while the metal interconnection (usually Cu to Cu) forms at low annealing temperatures ranging from 150oC to 300oC. A 6μm pitch process is currently in high volume production for wafer-to-wafer (W2W) hybrid bonding. Die-to-wafer (D2W) and die-to-die (D2D) assembly has been in development at Xperi. The unique challenges include producing shallow, uniform and well controlled Cu recess on Cu bond pads of 5 um or greater, which is substantially larger than what is normally used in W2W bonding and particle minimization on die surface prior to bonding. Xperi-designed daisy chain dies and wafers consist of chains ranging from 2 to 31356 interconnects. Die size is 7.96 mm by 11.96 mm, which is similar to a typical high bandwidth memory (HBM) die. The bonding studies include 10μm and 15μm diameter bond pads on 40μm pitch and 5μm diameter bond pads on 10μm pitch. The die thickness is either 50 μm or 200 μm. In this paper, we present the latest development of our chemical mechanical polish (CMP) technology to produce uniform shallow Cu recess on 15um circular bond pads. The large pad size allows for a relaxed alignment requirement to manufacturing high throughput flip chip bonders available today. Additionally, high volume production ready process for bonding and D2W multi-layer stacking are explored as well as bonding yield and reliability improvement results.
关键词： 2.5D,D2D,Cu-to-Cu bonding,DBI?,die stacking,D2W,3D,hybrid bonding
更新于2025-09-04 15:30:14
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[IEEE 2018 7th Electronic System-Integration Technology Conference (ESTC) - Dresden, Germany (2018.9.18-2018.9.21)] 2018 7th Electronic System-Integration Technology Conference (ESTC) - UV Assisted Chip-on-Wafer Direct Transfer Bonding (CoW DTB)
摘要： Chip-on-Wafer Direct Transfer Bonding (CoW DTB) technology employing a UV assisted chip transfer mechanism for the high-accuracy direct bonding application including III-V/Si, 2.5D/3D/Fan-Out integration was proposed. Basic experiments of the chip transfer process using the glass bond tool, which enables pressing the backside of the chips through the carrier sheet and UV irradiation to a UV peeling-type adhesive layer, were conducted. The experimental results show this novel process achieved stable chip transfer by optimizing the carrier sheet, glass bond tool design, and parameters such as UV irradiation intensity and time.
关键词： Oxide Bonding,III-V/Si,Chip-on-Wafer (CoW),Direct Bonding,Three-dimensional Integrated Circuit (3DIC),Fan-Out (FO)
更新于2025-09-04 15:30:14
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An Analytical Method for Modelling Pull-In Effect during Anodic Bonding
摘要： Pull-in effect is a common phenomenon during anodic bonding, a key step in the fabrication processes of capacitive sensors and actuators. To assist the designs and fabrications of these transducers, this paper presents an analytical method for modelling the pull-in effect during anodic bonding. The pull-in effect model was verified by finite element analysis and a verification experiment respectively. The verification results indicate that the analytical method for modelling the pull-in effect during anodic bonding is capable for predicting pull-in voltages of anodically bonded capacitive sensors and actuators in a universal and practical manner without any additional fabrication process.
关键词： pull-in effect,capacitive transducer,anodic bonding
更新于2025-09-04 15:30:14
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Microchannel Fabrication Using A Photo-Patternable Adhesive Material for Recording Conformational Changes of KcsA Channel with the Diffracted X-ray Tracking Method
摘要： Diffracted X-ray tracking (DXT) method can trace conformational changes of KcsA potassium ion channel during gating by recording position of diffraction spot from a gold nanocrystal attached to the channel as a movie. For high-resolution imaging under controlled microenvironments for KcsA channels, we report a microfluidic device consisting of two SiN membrane windows bonded with a photo patternable adhesive material. The reduced signal-to-background ratio as well as suitable adhesive material thickness for the microchannel are discussed in the experiment at the synchrotron radiation facility.
关键词： diffracted X-ray tracking method,adhesive bonding,microfluidics,KcsA ion channel
更新于2025-09-04 15:30:14
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Intrinsic and Extrinsic Heavy Atom Effect on the Multifaceted Emissive Behavior of Cyclic Triimidazole
摘要： Since heavy halogen atoms can be used to tune the emissive properties of organic luminogens, the understanding of their role in the photophysics is fundamental for materials engineering. Here, the extrinsic and intrinsic heavy atom effects on the photophysics of organic crystals are separately evaluated by comparing cyclic triimidazole (TT) with its mono-iodo derivative (TTI) and its cocrystal with diiodotetrafluorobenzene (TTCo). Crystals of TT show room temperature ultralong phosphorescence (RTUP) originated from H-aggregation. TTI and TTCo display two additional long lived components whose origin is elucidated through single crystal X-ray and DFT-TDDFT studies. The results highlight the different effects of the I atom on the three phosphorescent emissions. Intrinsic heavy atom effects play a major role on molecular phosphorescence which is displayed at RT only for TTI. H-aggregate RTUP and the I···N XB induced phosphorescences on the other side depend only on packing features.
关键词： photophysics,co-crystal,room temperature phosphorescence,halogen bonding,time resolved spectroscopy
更新于2025-09-04 15:30:14
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Steady State and Time-Resolved Fluorescence Study of 7,8-Benzoquinoline: Reinvestigation of Excited State Protonation
摘要： Steady state and time resolved spectral properties of 7,8-benzoquinoline (7,8-BQ) have been reinvestigated in a series of organic solvents of different proticity, polarity and wide range of pH. The salient features of this work are the effect of hydrogen bonding in protonation reaction which is explored through its behaviour in water and strong hydrogen bond donating solvent (trifluoroethanol). Quantum yield and rates (radiative, non-radiative and excited state protonation) have been calculated and discussed. Irreversible diffusion controlled excited state proton transfer in water and faster excited state protonation in trifluoroethanol is observed.
关键词： 7,8-benzoquinoline (Benzo[h]quinoline),protonation,trifluoroethanol,solvent,pH,hydrogen bonding
更新于2025-09-04 15:30:14
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Molecular properties, crystal structure, Hirshfeld surface analysis and computational calculations of a new third order NLO organic crystal, 2-aminopyridinium benzilate
摘要： A third order nonlinear optically active (NLO) organic proton transfer compound was synthesized by the reaction between 2-aminopyridine and benzilic acid. Single crystals of the product, 2-aminopyridinium benzilate, (2-APB) were grown by slow evaporation technique and the structure of 2-APB was confirmed by single crystal X-ray diffraction. In the structural network, cations and anions are linked through N+-H…O- intermolecular hydrogen bonding interactions. Elemental analysis, thermal analysis, UV-Vis, FT-IR and 1H and 13C NMR spectroscopic analyses were carried out to assess the structure and chemical makeup of the 2-APB crystal. Computational studies that include optimization of molecular geometry, natural bond orbital (NBO), Mulliken atomic charge and HOMO-LUMO analyses were also performed using B3LYP method at 6-311+ G (d,p) level of theory to explore various intermolecular interactions especially hydrogen bonding. Hirshfeld surface analysis indicates that the contacts involving hydrogen such as H…H, C…H and O…H have greater influence on the molecular properties of 2-APB.
关键词： NBO analysis,Hydrogen bonding,DFT,Single crystal XRD,Hirshfeld surface analysis
更新于2025-09-04 15:30:14
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Spectroscopic and electronic structure characterization of hydrogen bonding in 2-Bromohydroquinone
摘要： 2-Bromohydroquinone species form both intra- and inter-molecular H-bonds. The evidences for the H-bonds have been observed in the solid-phase Mid IR (4000?400 cm-1) and Near IR (8000?5000 cm-1) absorption spectra with two intensely broad bands near 3263 and 3222 cm-1 and a broad absorption in 7000?5200 cm-1 with a band maximum at 6335 cm-1. Dimer and trimer models with DFT’s B3LYP and BP86 functionals using 6-31G(d) and 6-311++G(d,p) basis sets have been proposed for the ?O?H···O bonding in 2-Bromohydroquinone. Out of the four predicted conformers, one trans and one cis conformers with nearly 1:1 Boltzmann populations, are separated by very small energy difference of 0.03 kcal/mol and this is confirmed by two chemical shifts at 9.0 and 9.3 ppm from an 1H NMR spectrum. On the basis of Quantum Theory of Atoms in Molecules (AIM) and reduced density gradient plots of electron densities and its isosurfaces by non-covalent interactions (NCI) method, the influence of the ?O?H···Br, weak van der Waals and ?O?H···O bond interactions on the stability of dimer and trimer structures have been analysed. From the natural bond orbital (NBO) analysis, it is explained that the formation of H-bonding may be attributed to charge transfer from the lone pair orbital n(O) of the base Oxygen into the vacant antibonding orbital σ*(OH) of the acid OH in the ?O?H···O bonding. The Near IR concentration-dependent spectra demonstrate that the sample of 2-Bromohydroquinone is composed of ?O?H···O bonded species and dissociate into non-bonded species as the mole fraction of the solvent (acetonitrile/1,4-dioxane) is increased. The band observed at 7095 cm-1 at 0.09 M is identified as the first overtone of the ?O?H stretching mode of the weak complex of 2-Bromohydroquinone and acetonitrile. The solvent effects on all the observed solution-phase NIR spectra are not ruled out.
关键词： H-bonding,AIM,NCI,IR spectra,2-Bromohydroquinone,DFT calculations
更新于2025-09-04 15:30:14
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Dynamics of Molecules Physically Adsorbed onto Metal Oxide Nanoparticles: Similarities between Water and a Flexible Polymer
摘要： Water at interfaces is considered present and important within almost all physical processes. Interfacial water shows nonbulk properties, however, its structure/organization and dynamics are on a still open debate. In parallel to that, the interfacial polymer in nanocomposites exhibits modi?ed structure and dynamics, the latter characteristic being widely considered responsible for the improved nanocomposite properties. One of the most suitable tools for studying dynamics of a variety of small molecules and macromolecules is broadband dielectric spectroscopy (BDS), mainly due to its high resolving power. BDS is employed here in combination with isothermal hydration and has proved quite illuminating in recording for the ?rst time striking similarities in the dynamics behavior between water molecules and ?exible polydimethylsiloxane macromolecules, when the latter molecules are individually adsorbed physically on the attractive surfaces of metal oxide nanoparticle. The qualitative similarities between water and polymer interfacial dynamics, for example, in their exhibiting time-scale and the elevation of the respective activation energy upon increasing of interfacial molecules fraction, lay most probably at the origins of the same main surface-adsorbed molecule interaction, i.e.. the hydrogen bonding. Whereas, the quantitative di?erences in molecular dynamics, e.g., slower, more energetically demanding, and cooperative interfacial dynamics for the polymer than for water, arise from the di?erent scale of the two molecular motions (<1 nm for water and ≥1 nm for the polymer) and/or from alternations in interfacial layer density.
关键词： dielectric spectroscopy,water,nanoparticles,polydimethylsiloxane,interfaces,dynamics,hydrogen bonding
更新于2025-09-04 15:30:14
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Fullerenes and Relative Materials - Properties and Applications || How Important is Metal-Carbon Back-Bonding for the Stability of Fullerene-Transition Metal Complexes? Role of Cage Sizes, Encapsulated Ions and Metal Ligands
摘要： A density functional study of {η2-(X@Cn)}ML2 complexes with various cage sizes (C60, C70, C76, C84, C90, C96), encapsulated ions (X = F?, 0, Li+) and metal fragments (M = Pt, Pd) is performed, using M06/LANL2DZ levels of theory. The importance of π back-bonding to the thermodynamic stability of fullerene-transition metal complexes ({η2-(X@Cn)}ML2) and the effect of encapsulated ions, metal fragments and cage sizes on the π back-bonding are determined in this study. The theoretical computations suggest that π back-bonding plays an essential role in the formation of fullerene-transition metal complexes. The theoretical evidence also suggests that there is no linear correlation between cage sizes and π back-bonding, but the encapsulated Li+ ion enhances π back-bonding and F? ion results in its deterioration. These computations also show that a platinum center produces stronger π back-bonding than a palladium center. It is hoped that the conclusions that are provided by this study can be used in the design, synthesis and growth of novel fullerene-transition complexes.
关键词： π back-bonding,fullerene-transition metal complex,encapsulated ions,metal fragments and cage sizes
更新于2025-09-04 15:30:14