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Effect of Deposition Pressure, Nitrogen Content and Substrate Temperature on Optical and Mechanical Behavior of Nanocomposite Al-Si-N Hard Coatings for Solar Thermal Applications
摘要： Hard and optically transparent nanocomposite Al-Si-N thin films were deposited using DC magnetron sputtering at different process parameters. There was a significant effect of these parameters on the film properties affecting its mechanical and optical behavior. The nitrogen content or pressure, deposition pressure and substrate temperature strongly influence the phase formation which governs the hardness and optical transparency of the coating. Hardness was measured between 18 and 30 GPa. The band gap could be varied in the range of 3.8-4.2 eV by varying nitrogen pressures in the chamber during deposition. The films showed (0-80)% transparency in UV and visible region depending on the sputtering conditions.
关键词： mechanical behavior,optical coating,nanocomposite hard coatings
更新于2025-09-23 15:21:21
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The influence of positive pulses on HiPIMS deposition of hard DLC coatings
摘要： Diamond-like carbon (DLC) coatings were deposited by a novel HiPIMS method that incorporates positive voltage pulses at the end of the conventional HiPIMS discharge. Different positive voltage amplitudes (100, 200, 300, 400 and 500 V) were used to evaluate the effect of this operation mode on the discharge process and the mechanical properties of the deposited DLC coatings. The application of positive pulses was observed to enhance the ionization of both the sputtered carbon and argon species. Mass spectroscopy measurements showed that a larger amount of high-energy C+ ions are generated, with ion energies proportional to the amplitude of the overshoot voltage. The ion bombardment induced by the positive pulses led to higher compressive residual stresses and densification of deposited DLC coatings. Moreover, their Raman spectra exhibited lower D-band and G-band intensity ratios (ID/IG) as the pulses voltage was increased which is indicative of higher sp3 content. Mechanical properties were evaluated by nanoindentation testing and the hardness of the deposited DLC films was observed to increase from 9.6 GPa (for no voltage pulse applied) to 22.5 GPa (for an applied positive pulse voltage of 500 V).
关键词： HiPIMS,Hard coatings,Diamond-like Carbon (DLC),Tribology
更新于2025-09-23 15:21:01