[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Fabrication of Cavity-Sealed Optical Interferometric Surface Stress Biosensor by thin Film Transfer Technique

摘要： We developed a surface stress sensor based on a MEMS Fabry-Perot interferometer with cavity-sealed structure by technique of nanometer-thick parylene sheet for highly sensitive label-free biosensing. The proposed MEMS interferometer can measure the membrane deflection caused by target molecule adsorption as the spectral shift. The proposed cavity-sealed optical interferometer can prevent physical adsorption to the backside of membrane and refractive index drift in the cavity, leading to improvement of sensitivity. We successfully obtained the spectral shift of 77 nm in 10 minutes with the color change associated with the antigen-antibody reaction with a concentration of 1 ng/ml, which improved by 16.7-fold compared with the conventional sensor.