[IEEE 2019 IEEE Photonics Conference (IPC) - San Antonio, TX, USA (2019.9.29-2019.10.3)] 2019 IEEE Photonics Conference (IPC) - Edge Breakdown Suppression of Avalanche Photodiodes using Zn Diffusion and Selective Area Growth

摘要： Avalanche photodiodes are fabricated and characterized, using a single diffusion fabrication process with the surface patterned by selective area growth prior to diffusion. Raster mapping of the photocurrent near the breakdown voltage is used to characterize the electric field distribution in the multiplication layer. Devices fabricated with the precursor CBrCl3 introduced during selective area epitaxy show a smoother surface morphology and effective edge breakdown suppression, while those fabricated without CBrCl3 have a rougher surface morphology and exhibit evidence of premature edge breakdown at the corners of the device along specific crystal orientations. Comparison of the dark current – voltage curves below breakdown shows a reduction of dark current associated with the use of CBrCl3, as well as with the inclusion of floating guard rings in the device design.