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Plasma Science and Technology - Progress in Physical States and Chemical Reactions || Plasma-Enhanced Laser Materials Processing
摘要： In the last few years, the combination of laser irradiation with atmospheric pressure plasmas, also referred to as laser–plasma hybrid technology, turned out to be a powerful technique for different materials processing tasks. This chapter gives an overview on this novel approach. Two methods, simultaneous and sequential laser-plasma process‐ ing, are covered. In the first case, both the plasma and the laser irradiation are applied to the substrate at the same time. Depending on the process gas and the discharge type, the plasma provides a number of species that can contribute to the laser process plasma- physically or plasma-chemically. Sequential plasma-enhanced laser processing is based on a plasma-induced modification of essential material properties, thus improving the coupling of laser energy into the material during subsequent laser ablation. Simultane‐ ous plasma-assisted laser processing allows increasing the efficiency of a number of dif‐ ferent laser applications such as cleaning, microstructuring, or annealing processes. Sequential plasma-assisted laser processing is a powerful method for the processing of transparent media due to a reduction in the laser ablation threshold and an increase in the ablation rate at the same time. In this chapter, the possibilities, underlying mecha‐ nisms, performance, and limits of the introduced approaches are presented in detail.
关键词： Laser-plasma-hybrid techniques,microstructuring,atmospheric pressure plasma,modification,cleaning
更新于2025-09-23 15:21:01
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Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning
摘要： Grayscale electron beam lithography (g-EBL) is a fabrication technique that allows for tunable control of resist topography. In most cases, the height of the structures is in the submicron regime. Here, we present an extensive experimental characterization of the post electron beam exposure behavior of poly(methyl methacrylate) (PMMA) 950K for grayscale structuring with several micrometers in height. The obtained results show that the development depth for the same electron dose is dependent on the time between exposure and development. This dependence becomes more prominent at higher exposure doses. Additionally, it was found that a post-exposure bake influences the dose-response behavior of the resist material and, therefore, also the obtained three-dimensional (3D) structure. This work paves the way for well-controlled 3D micrometer structuring via g-EBL.
关键词： delayed development,PMMA 950K,3D microstructuring,post-exposure bake,grayscale e-beam lithography
更新于2025-09-23 15:19:57
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Conical microstructuring of titanium by reactive gas assisted laser texturing
摘要： Femtosecond laser micromachining is an important and flexible method to generate precisely targeted surfaces on various materials. On titanium, the laser structuring process strongly depends on the laser parameters. For example, an increasement of the pulse length and repetition rate favors melting processes instead of ablation and microstructuring. We report on an investigation of reactive halogens (iodine, bromine, chlorine) and halocarbons as additives to the laser structuring process of pure titanium and the common alloy Ti-6Al-4V with 0.75 ps laser pulses. The choice of the halogen allows control of whether solely the chemical composition or the surface microstructure should be altered. Bromine was found to be an efficient additive to generate homogeneous microstructures based on micropillars at convenient conditions (air, atmospheric pressure). The resulting surfaces have been characterised by thermal emission infrared photography, scanning electron microscopy, energy dispersive X-ray spectroscopy, reflective UV/Vis spectroscopy and contact angle measurements. The bromine/air processed titanium surfaces revealed superhydrophilicity, strongly increased thermal emissivity and a high absorptivity (“black metal”).
关键词： Superhydrophilicity,Reactive halogens,Absorptivity,Titanium,Femtosecond laser micromachining,Microstructuring,Thermal emissivity
更新于2025-09-16 10:30:52
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Fabrication of diamond diffractive optics for powerful CO2 lasers via replication of laser microstructures on silicon template
摘要： New approach to fabricate diamond diffractive optical elements (DOEs) with continuous relief for powerful CO2 lasers is proposed and tested. It involves short-pulse laser microstructuring of a silicon wafer, which further is used as a substrate for polycrystalline diamond growth in a microwave plasma-assisted CVD process. After fine mechanical polishing of the growth side of the diamond film, the silicon substrate is removed via chemical etching. Two different DOEs providing close to 100% diffraction efficiency were fabricated with this technique: cylindrical Fresnel lens with kinoform surface profile and three-beam splitter with continuous microrelief. Optimization of the laser processing conditions has made possible to reduce the final roughness of the structured diamond surface to 200-400 nm depending on the local relief depth (0-7 μm). Both DOEs tested with a CO2 laser have demonstrated high transparency and diffraction efficiency, as well as low radiation scattering of the IR radiation at the surface irregularities.
关键词： laser microstructuring,diffraction efficiency,CVD process,diamond diffractive optics,CO2 lasers,silicon template
更新于2025-09-12 10:27:22
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Fabrication of hierarchical surface textures using multi-pulse Direct Laser Interference Patterning with nanosecond pulses
摘要： In this study, we report on the one-step fabrication of hierarchical microstructures on stainless steel substrates using multi-pulse Direct Laser Interference Patterning. The complex structures are produced using a two-beam interference setup with nanosecond laser pulses. The effect of laser fluence and number of pulses on the formation of multi-scale microstructures is systematically investigated. The resulting surface structures are characterized by scanning electron microscopy and white light interference microscopy. It was observed that at low laser fluence, the periodic microstructures remain defined and grow in height above the initial surface, independent on the number of pulses. For higher laser fluences as well as larger number of pulses, the structures adopt a crater-like morphology including a periodic line-like structure.
关键词： multi-scale structures,Direct Laser Interference Patterning,nanosecond pulsed laser,surface microstructuring
更新于2025-09-12 10:27:22