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Detection of NH<SUB>3</SUB> Using ZnO Thin Film Sensor Deposited on Si/SiO<SUB>2</SUB> Substrate Derived by RF Magnetron Sputtering
摘要： This paper reports the research results of Zinc Oxide (ZnO) thin film gas sensor which is able to detect low concentration of ammonia gas (NH3). Pure ZnO layer is deposited on Si/SiO2 substrate at room temperature by RF magnetron sputtering technique. Pt micro-heater, platinum resistance thermometer (PRT) and gold electrodes are also fabricated along with ZnO thin film to make a complete NH3 sensor device and the fabrication process is discussed in detail in this manuscript. The deposited ZnO thin film is annealed at different temperatures and the effect of annealing temperature on the properties of ZnO thin film is analyzed by using various characterization techniques such as surface profilometer, XRD, SEM, EDX, etc. A measurement set-up is established for the measurements of various sensor parameters. An operating temperature is optimized for the NH3 gas sensor to enhance the sensitivity of the device. The optimized operating temperature is achieved and measured by Pt heater and PRT, respectively. The measurements are also performed for Pt micro-heater and PRT to calibrate the temperature with respect to heater current. Finally, the gas sensing measurements are performed in the range of small NH3 concentration (below 10 ppm) and the results confirm very good sensitivity even in very small NH3 concentration.
关键词： NH3 Gas,Thin Film,Pt Microheater,NH3 Gas Sensor,RF Sputtering,ZnO
更新于2025-09-23 15:22:29
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Influence of Ag NPs on Silicon Nanocolumns NH <sub/>3</sub> Gas Sensors
摘要： Two NH3 gas sensor devices, Al/Si nanocolumns/n-Si/Al and Al/Ag NPs/Si nanocolumns/n-Si/Al hybrid structures, have been fabricated and tested. A bare silicon nanocolumns layer was synthesized by a laser-assisted electrochemical etching process in HF solutions. The surface morphology of bare Si nanocolumns was modified by incorporating Ag NPs into Si nanocolumns by simple and fast immersions methods in an aqueous solution of AgNO3 to synthesize a hybrid structure. Characteristic features of bare Si nanocolumns and hybrid structure were investigated using scanning electron microscopy, EDS analysis, FTIR spectra, X-ray diffraction, and photoluminescence spectra (PL). The electrical characteristics of sensors with and without NH3 gas were measured at room temperature. The results showed that the nanoparticles grain size, nature, specific surface area (S.S.A) of Ag NPs, and morphological structure of the Si nanocolumns strongly affected the property characteristics. A significant enhancement in sensitivity, response, and recovery times of gas sensor for a hybrid structure was realized after compared with Al/Si nanocolumns/n-Si/Al gas sensor due to the high specific surface area.
关键词： silicon nanocolumns,response time,NH3 gas sensor,sensitivity,Ag NPs,hybrid structure,recovery time
更新于2025-09-23 15:21:01
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Preparation and NH3 Gas-Sensing Properties of Double-Shelled Hollow ZnTiO3 Microrods
摘要： A novel double-shelled hollow (DSH) structure of ZnTiO3 microrods was prepared by self-templating route with the assistance of poly(diallyldimethylammonium chloride) (PDDA) in an ethylene glycol (EG) solution, which was followed by calcining. Moreover, the NH3 gas-sensing properties of the DSH ZnTiO3 microrods were studied at room temperature. The morphology and composition of DSH ZnTiO3 microrods films were analyzed using scanning electron microscopy (SEM), transmission electron microscopy (TEM) and X-ray diffractometry (XRD). The formation process of double-shelled hollow microrods was discussed in detail. The comparative gas-sensing results revealed that the DSH ZnTiO3 microrods had a higher response to NH3 gas at room temperature than those of the TiO2 solid microrods and DSH ZnTiO3 microrods did in the dark. More importantly, the DSH ZnTiO3 microrods exhibited a strong response to low concentrations of NH3 gas at room temperature.
关键词： room-temperature,NH3 gas sensor,ZnTiO3 microrods,Double-shelled hollow
更新于2025-09-16 10:30:52