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Ultrathin Fully Printed Light-Emitting Electrochemical Cells with Arbitrary Designs on Biocompatible Substrates
摘要： Organic electronic devices are often highlighted in terms of cost-efficient solution processing and potential printability. However, few studies are reporting truly full-solution-processed devices taking into account the electrodes as well as all other layers. This results in a production method that only partially benefits from the cost efficiency of solution processing and that still depends on costly and elaborate techniques like evaporation and/or lithography. This lack of knowledge is addressed by presenting a truly fully printed light-emitting electrochemical cell on ultraflexible parylene C substrates usable for conformable electronics. All device parts are fabricated by industrial relevant printing-techniques under ambient atmosphere. Inkjet printing is used for the structuring of the device layout and is therefore able to implement and create arbitrary designs. Further layers are produced by blade coating which is well suited for the coating of large areas. The devices show stable operation at a luminance higher than 100 cd m?2 for 8.8 h, can reach a maximum brightness of 918 cd m?2, and exhibit a turn-on time of 40 s to reach 100 cd m?2. Moreover, biocompatible and biodegradable materials are utilized to allow potential applications in life science and bioelectronics.
关键词： fully printed electronics,light-emitting electrochemical cells,parylene,inkjet,bioelectronics,digital printing,conformable electronics
更新于2025-09-23 15:23:52
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Examination of dielectric strength of thin Parylene C films under various conditions
摘要： The breakdown voltage of the biocompatible polymer Parylene C was determined after storage in 60°C saline solution and treatment by autoclave. It occurred that both, storage at 60°C in saline solution and autoclaving, lead to distinct decrease of dielectric strength by approximately 50%.
关键词： Parylene C,dielectric strength,insulation,encapsulation,implant
更新于2025-09-23 15:22:29
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Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
摘要： Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier properties and biocompatibility. In the past few decades, the adaptation of planar microfabrication processes to thin film Parylene C has encouraged its use as an insulator, structural and substrate material for MEMS and other microelectronic devices. However, Parylene C presents unique challenges during microfabrication and during use with liquids, especially for flexible, thin film electronic devices. In particular, the flexibility and low thermal budget of Parylene C require modification of the fabrication techniques inherited from silicon MEMS, and poor adhesion at Parylene-Parylene and Parylene-metal interfaces causes device failure under prolonged use in wet environments. Here, we discuss in detail the promises and challenges inherent to Parylene C and present our experience in developing thin-film Parylene MEMS devices.
关键词： MEMS,Parylene,microfabrication
更新于2025-09-23 15:21:21
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Enhanced Stability of MAPbI3 Perovskite Solar Cells using Poly(p-chloro-xylylene) Encapsulation
摘要： We demonstrated an effective poly(p-chloro-xylylene) (Parylene-C) encapsulation method for MAPbI3 solar cells. By structural and optical analysis, we confirmed that Parylene-C efficiently slowed the decomposition reaction in MApbi3. From a water permeability test with different encapsulating materials, we found that parylene-c-coated MApbi3 perovskite was successfully passivated from reaction with water, owing to the hydrophobic behavior of parylene-c. As a result, the parylene-c-coated MApbi3 solar cells showed better device stability than uncoated cells, virtually maintaining the initial power conversion efficiency value (15.5 ± 0.3%) for 196 h.
关键词： perovskite solar cells,MAPbI3,stability,Parylene-C,encapsulation
更新于2025-09-12 10:27:22
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[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Wrinkled Microelectrode Interface Based on Oil-Pretreated Hyperelastic Substrate
摘要： This paper reports a unique fabrication method to obtain wrinkled microelectrodes with different surface morphologies based on different hyperelastic substrates for the first time. The wrinkle microstructures are enhanced by mixture silicone oil in the uncured poly (dimethyl siloxane) (PDMS) or Ecoflex polymer followed by oil-extraction in chloroform and depositing 5 μm Parylene-C film. The wrinkle amplitude of the oil-pretreated PDMS and Ecoflex with Parylene-C top layer show 5-fold and 125-fold increase than the unpretreated ones, respectively. Besides, the wrinkled 3D microelectrode surface distinctly exhibits greater electrochemical properties than the flat 2D one, with impedance decreases of 29.2% and 38.9% for the oil-pretreated PDMS and Ecoflex elastomer.
关键词： oil-pretreatment,wrinkled microelectrodes,electrochemical properties,Parylene-C,hyperelastic substrate
更新于2025-09-11 14:15:04
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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A Process to Realize Direct Laser Written Electrostatic Actuator Elements in a Closed Microcavity
摘要： For the first time an electrostatic actuator made by 2-photon polymerization (2PP) that is integrated in a closed microcavity is presented. The cavity is closed by wafer-to-wafer bonding of Parylene-C coated borosilicate glass and silicon wafers. Additionally, the Parylene-C serves as electrical insulation. The actuator consists of a free-standing, electrically connected, movable platform with an outer diameter of 260 μm supported by conical springs. The structure can act as a microfluidic valve. The novel wafer-scale fabrication process enables the electrical connection and electrostatic actuation of movable 2PP-structures and the patterning of a metallization on wafers containing 76 μm high 3D structures. Furthermore, a silicon wafer and a borosilicate glass wafer, which contains metallized 2PP-structures that can withstand a limited temperature load only, are bonded. This process has great potential for versatile applications in MEMS.
关键词： additive manufacturing,3D actuator,Parylene-C bonding,DLW,2PP,active microvalve
更新于2025-09-11 14:15:04
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Stretchable Parylene-C electrodes enabled by serpentine structures on arbitrary elastomers by silicone rubber adhesive
摘要： The delicate serpentine structures are widely used in high-performance stretchable electronics over the past decade. The metal interconnects encapsulated in biocompatible polymer Parylene-C film is a superior choice for long-term implantation in vivo, especially as neural interface to acquire electrophysiological signals or apply electrical stimulation. To avoid the physical contact damages from the neural tissues such as the brain or peripheral nerves, serpentine interconnects are utilized as stretchable electrodes and usually bonded to the soft elastomer substrate. The adhesion strength between the serpentine interconnects and the elastomer substrate becomes a considerable issue to ensure reliability and structural integrity. In this paper, the stretchable Parylene-C electrodes can be transfer printed onto arbitrary elastomer substrates by a thin layer of silicone rubber adhesive with low modulus for electrocorticogram (ECoG) recording. Mechanical simulation of serpentine structures consisting of same periodic arcs and different straight segments is investigated by uniaxial stretching. Then, the elastic stretchability of serpentine electrodes is further studied by simulation and experiments. After 5000 repetitive stretching cycles, the electrochemical impedance of microelectrodes remains in steady states. These results prove that the silicone rubber adhesive facilitates the interfacial bonding in the structure of stretchable electrodes as the compliant and reliable neural interface.
关键词： Serpentine structures,Electrocorticogram (ECoG) recording,Parylene-C,Silicone rubber adhesive,Stretchable electrodes
更新于2025-09-11 14:15:04