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[IEEE 2018 Second International Conference on Electronics, Communication and Aerospace Technology (ICECA) - Coimbatore (2018.3.29-2018.3.31)] 2018 Second International Conference on Electronics, Communication and Aerospace Technology (ICECA) - Optimum Design of PolyMUMPs Based Thermoelectric Generator Chip
摘要： In this work, a design of poly Multi-User MEMS Processes, or PolyMUMPs based micro-thermoelectric generator (μTEG) with cost effective is presented. The presented 3-D numerical simulation model is verified with published experiment in previous work results by another author. The simulation results show that the output power at 1.3 K of temperature difference between the hot and cold sides of PolyMUMPs-μTEG device with the heat sink effect at optimal dimension is 16.56 μW.
关键词： PolyMUMPs,Multiphysics modeling,TEG,Seebeck effect
更新于2025-09-10 09:29:36
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Post Fabrication Processing of Foundry MEMS Structures Exhibiting Large, Out-of-Plane Deflections
摘要： This research effort is focused on the development of large angle, out-of-plane bimorph MEMS micromirrors fabricated in the PolyMUMPs foundry process. Based on design constraints of the PolyMUMPs process, current designs fabricated do not meet the requirements to enable large angle optical steering. Through Comsol modeling and simulation, several post-processing techniques were discovered that could be used to meet the required large out-of-plane deflections. We have performed several post-processing techniques to include silicon nitride and high temperature evaporated gold to verify our Comsol modeling results. Our experimental tests validate the Comsol results of greater than 400 μm deflections are achievable.
关键词： Bimorph,MEMS,PolyMUMPs,micromirror
更新于2025-09-09 09:28:46