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Physical properties of RF magnetron sputtered GaN/n-Si thin film: impacts of RF power
摘要： GaN thin film was successfully produced on n-Si(100) substrate by RF magnetron sputter under different RF power. Experimental measurement techniques such as UV/Vis spectroscopy, field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), atomic force microscopy (AFM), and Micro-Raman Spectroscopy were used to research effects of Radio Frequency power on physical properties of produced thin film. It has been found that produced thin film was polycrystalline structure with (100) and (110) planes of hexagonal GaN from X-ray diffraction measurement result. It also proved that increasing RF power gives rise to deterioration in crystal quality of GaN thin film. Reason of this deterioration was discussed. It has been achieved that increasing RF power has resulted in decreasing optical band gap energy of GaN thin film. Reasons for these changes in optical band gap energy were explained. It was seen that some thin films were grown as layer-plus-island mode (Stranski–Krastanov growth mode) and others were grown as layer-by-layer growth mode (Frank van der Merwe mode) from AFM analysis. It has been found that increasing RF power has resulted in improvement of surface morphology of thin film from field emission scanning electron microscopy analysis. However, reaching RF power to 125 W leads to start to deteriorate of surface of GaN thin film. The reasons for this have been discussed. E1(TO) transverse optical phonon mode of hexagonal GaN with different intensity was detected from Micro-Raman Spectroscopy measurement. The reasons for this difference have been discussed. It was concluded that RF power has played a significant role in growing high quality GaN thin film. Morphological, structural, and optical properties of GaN thin film were enhanced by controlling RF power, making them a potential candidate for LED, solar cell, diode application.
关键词： Thin film,III-nitride,RF magnetron sputter,Semiconductor,GaN
更新于2025-11-14 15:25:21
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Mesoporous black TiO2 array employing sputtered Au cocatalyst exhibiting efficient charge separation and high H2 evolution activity
摘要： The separation and transfer of photogenerated carriers are the key issue in the design of high performance TiO2 photocatalysts. In order to overcome the kinetic limitations and achieve rapid charge transfer, TiO2-related multi-component catalysts have been extensively studied. Among all the TiO2 supports, the impressive black TiO2 (BT) with broad visible light absorption spectrum and oxygen vacancies are preferable, but still suffers from low quantum efficiency. Meanwhile, poor control of cocatalyst placement by conventional loading method can also severely impede photocatalytic efficiency. Herein a fast and simple metal magnetron sputter approach was used to place highly-uniformed Au nanoparticles cocatalyst on the top of the mesoporous TiO2-BT nanotube array fabricated by in situ electrochemical anodization approach on a Ti film. This confined plasmonic photocatalyst with highly uniformly distributed Au cocatalysts exhibited greatly enhanced charge-separation and charge-transfer behavior, and a remarkable 10 times enhancement of the photocatalytic H2 evolution reactivity over conventional TiO2 nanotube. The TiO2-BT-Au electron transfer cascade structure is proposed in which black TiO2 acts as a buffer layer for TiO2 conduction band electrons, allowing efficient photogenerated electrons to be transferred to Au nanoparticles and then into the TiO2 pores that suitable for H2 generation. Since the nanotube walls themselves are curved upwards, the short diffusion length allows electrons to be easily transferred to the cocatalyst, where recombination of photogenerated electron pairs is limited. The metal magnetron sputter technique for noble metal cocatalyst immobilization and the unique TiO2-BT-Au electron-transfer system are promising and can be extended to the design of other supported catalysts.
关键词： Metal magnetron sputter,TiO2 nanotube arrays,Oxygen vacancies,Hydrogen evolution,Au nanoparticle,Black TiO2
更新于2025-09-23 15:21:01