Statistical Analysis of the Current–Voltage ( <i>I</i> – <i>V</i> ) and Capacitance–Voltage ( <i>C</i> – <i>V</i> ) Characteristics of the Au/Ir/ <i>n</i> -InGaN Schottky Barrier Diodes

摘要： In the present work, 20 Au/Ir/n-InGaN Schottky barrier diodes (SBDs) are fabricated using a electron beam evaporation technique. The Schottky barrier parameters such as ideality factor (n), Schottky barrier height (SBH) ((cid:2)b(cid:3) and donar concentration (Nd (cid:3) values are determined by current–voltage (I–V ) and capacitance–voltage (C–V ) measurements at room temperature. From I–V measurements, the statistical distribution of data gives the mean SBH value of 0.70 eV with a normal deviation of 10 meV and mean ideality factor value of 1.50 with a normal deviation of 0.0478. Two important parameters such as series resistance (RS(cid:3) and shunt resistance (cid:3) are also evaluated from the I–V characteristics. Furthermore, Norde and Cheung’s methods are used to evaluate the SBH, ideality factor and series resistance. The statistical distribution of C–V data gives the mean SBH value of 0.91 eV with a normal deviation of 12 meV and mean donar concentration of 0.71 × 1017 cm?3 with a normal deviation of 0.018 × 1017 cm?3, respectively.