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[IEEE 2018 IEEE International Conference on Semiconductor Electronics (ICSE) - Kuala Lumpur (2018.8.15-2018.8.17)] 2018 IEEE International Conference on Semiconductor Electronics (ICSE) - Dynamic Behavior of Condenser Microphone Under the Influence of Squeeze Film Damping
摘要： This paper investigates the effect of squeeze film damping on a micromechanical structure that oscillates due to the pressure distribution on moveable top plate that pair with perforated backplate. The damping characteristics are analytically evaluated to establish the optimum design that increase dynamics performance. The squeezed film damping governing equation, the Reynolds equation, is the fundamental equation of this work. The damping coefficient, air gap damping and viscous damping are calculated by using Skvor’s formula. The size of perforation holes and air gap thickness that influencing the squeeze film damping were studied. Analytical solution with various holes structure are summarized. Overall, the 3μm of hole radius, 50μm of holes center-to-center distance and 4μm of air gap thickness were found to be the best in order to reduce squeeze film damping in capacitive microphone.
关键词： perforated structure,viscous damping,squeeze film damping
更新于2025-09-23 15:21:21
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Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction
摘要： In this paper, the effect of relative humidity of moist air is discussed on the quality factor (Q factor) of micro-electro-mechanical systems (MEMS) cantilever resonators in wide range of gas rarefaction (ambient pressure and accommodation coefficients, ACs). The modified molecular gas lubrication (MMGL) equation is used to model the squeeze film damping problem of MEMS cantilever resonators. Dynamic viscosity and Poiseuille flow rate are used to modify the MMGL equation to consider the coupled effects of relative humidity and gas rarefaction. Thermoelastic damping and anchor loss, which are dominant damping mechanisms of MEMS cantilever resonators, are also included to calculate total Q factor. Thus, the influences of relative humidity are discussed on the Q factors of MEMS cantilever resonators in wide range of gas rarefaction and dimension of cantilever. The results showed that the Q factor decreases as relative humidity increases in wide range of gas rarefaction (pressure, and ACs) and dimension of cantilever (length, width, and thickness). The influences of relative humidity on the Q factor become more significantly in larger length, larger width, smaller thickness of cantilever, and higher gas rarefaction (lower pressure and ACs). Whereas, the influences of relative humidity on the Q factor reduce or are neglected in smaller length, larger thickness of cantilever and lower gas rarefaction (higher pressure and ACs).
关键词： Anchor loss,Relative humidity,Quality factor,Gas rarefaction,Squeeze film damping,Thermoelastic damping,MEMS cantilever resonators
更新于2025-09-10 09:29:36