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A review of highly reliable flexible encapsulation technologies towards rollable and foldable OLEDs
摘要： As the demand for flexible, rollable, and foldable displays grows, various state-of-the-art component technologies, including thin-film transistors (TFTs), electrodes, thin-film encapsulations (TFEs), and touch screen panels, have been developed based on organic light-emitting diodes (OLEDs) with flexible organic layers. Developing highly reliable flexible OLEDs is essential to realize flexible displays, but the flexible encapsulation technology still has technical difficulties and issues to be addressed. This review covers the recent developments in encapsulation technologies, particularly their material and structural designs, for highly reliable, flexible OLEDs. The solution concepts for the existing technical hurdles in flexible encapsulations are addressed. Among the various advanced flexible encapsulation technologies developed so far, neutral-axis engineering with a thin metal layer and a crack arrester is introduced.
关键词： organic light-emitting diode (OLED),Thin-film encapsulation (TFE),foldable,flexible,rollable
更新于2025-09-16 10:30:52
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3.4: Applications of TFE mask‐less technology for foldable AMOLED displays
摘要： Thin-film encapsulation (TFE) for foldable AMOLED display is necessary to have good reliability and excellent bendability. TFE mask induces particles easily and crack occurs in thick TFE layer during panel bending. We developed TFE with Al2O3 layer for high water-proof and very thin thickness, satisfying the requirement of reliability and bendability. The Al2O3 layer in TFE structure was deposited by low temperature atomic layer deposition (ALD) method，and we realized TFE mask-less process through adapting dry-etch parameters for Al2O3 etch, finding that BCl3 has very excellent dry-etch selectivity between inorganic layer (SiOx/SiNx/SiOxNy) and Al2O3. Besides, we also attempted to make the organic layer of TFE acted as etch mask, and it proved to be feasible, indicating that all the TFE masks could be taken out effectively. Moreover, we proved good optic and reliability characteristics of AMOLED display with mask-less TFE structure.
关键词： Atomic Layer Deposition (ALD),mask-less,Thin-Film Encapsulation (TFE),AMOLED
更新于2025-09-11 14:15:04