[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - A Miniature System for Classification and Concentration Detection of PM Based on 3D Printed Virtual Impactor and QCM Sensor

摘要： In this paper, we report a miniature system for separation and concentration detection of airborne particulate matter (PM) based on three-dimensional (3D) printed virtual impactor and quartz crystal microbalance (QCM) sensor. The virtual impactor is optimized by computational fluid dynamics (CFD) simulation to have a relatively small size of 24 × 24 × 10 mm3. The performance of the miniature PM monitoring system is characterized through classification and detection of silicon oxide powers with diameter ranging from 0.5 to 10 μm in a chamber. The experimental results show that particles smaller than cutoff diameter of 2.5 μm are separated by the virtual impactor according to their size and detected by the QCM sensor. Moreover, the resonant frequency of the QCM sensor shows a linear decrease with the increment of PM mass loading.