[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Commutable cold cathodes based on vertically aligned carbon nanotubes with a buried modulation electrode

摘要： A new design of commutable CNT emitters cathode with an on-chips gate has been investigated. Both fabrication and field emission proprieties of a buried gate cathode have been demonstrated. Current modulation by applying a small bias on the buried gate has been performed. This design shows excellent modulation properties and a high robustness.