[IEEE 2018 IEEE 38th International Conference on Electronics and Nanotechnology (ELNANO) - Kiev (2018.4.24-2018.4.26)] 2018 IEEE 38th International Conference on Electronics and Nanotechnology (ELNANO) - ITO-Nano-Titania Gas Sensors at Adsorption of Ethanol, Acetone and Water Molecules

摘要： The measurements capacitance-voltage characteristics and capacitance kinetics were applied for investigation of physical principle of sensor response in the ITO – nanostructured titanium dioxide heterojunction. The studies were fulfilled for ethanol, acetone and water vapor under various frequencies of probing signal. It was shown that processes of surface states recharging are making the most significant contribution to the total capacitance of the studied heterojunction and playing a major role in forming of sensor response to the molecules of the used analytes.