[IEEE 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Paris, France (2018.7.8-2018.7.13)] 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Diffraction Correction of Locking Fabry-Perot Interferometer in Calculable Capacitor at NIM

摘要： This paper describes a diffraction correction of the displacement measurement in calculable capacitor. A mathematical model of the locking interferometer based on Gaussian beam propagation is set up. The phase difference between the two cavities of interest is analyzed numerically. The simulation result demonstrates that the minimum value of the displacement correction can be obtained by actively detecting the laser light at a distance of 560 mm from output mirror.