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Design of Microdisk-Shaped Ge on Si Photodetector with Recess Structure for Refractive-Index Sensing
摘要： In this paper, we introduce a disk-shaped Ge-on-Si photodetector for refractive-index difference sensing at an operating wavelength of 1550 nm. For the implementation of a small-scale sensor, a Ge layer was formed on top of a Si layer to increase the absorption coefficient at the expense of the light-detection area. Additionally, the sensor had a ring waveguide structure along the edge of the disk formed by a recess into the inner part of the disk. This increased the interaction between the dominant optical mode traveling along the edge waveguide and the refractive index of the cladding material to be sensed, and conclusively increased detection sensitivity. The simulation results show that the proposed sensor exhibited a detection sensitivity of >50 nm/RIU (Refractive Index Unit), a quality factor of approximately 3000, and a minimum detectable refractive index change of 0.95 × 10?2 RIU with a small disk radius of 3 μm. This corresponds to 1.67 times the sensitivity without a recess (>30 nm/RIU).
关键词： refractive index sensor,disk resonator,silicon on insulator,germanium photodetector
更新于2025-09-11 14:15:04
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[IEEE 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Paris, France (2018.7.8-2018.7.13)] 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Broadband Permittivity Measurements Using a Frequency-Variable Balanced-Type Circular-Disk Resonator
摘要： We have experimentally veri?ed that the balanced-type circular-disk (BCD) resonator method can provide permittivity measurements at almost arbitrary frequency points by changing the size of the circular disk that constitutes the resonator. Resonant frequencies of the BCD resonator can be changed by replacing the expendable parts instead of including a movable part in the resonator. We clari?ed that a highly stable and rather simple permittivity measurements at a desired frequency point can be realized with the BCD resonator by demonstrating the consistency of measured permittivities of a low-loss material obtained with ?ve circular disks with different radii.
关键词： Circular-disk resonator,resonator method,relative permittivity,loss tangent,permittivity measurement
更新于2025-09-10 09:29:36