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[ASME ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Quebec City, Quebec, Canada (Sunday 26 August 2018)] Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems - Complex Logic Operations Based on MEMS Resonators
摘要： Complex logic functions based on micro electromechanical resonators has significant attention. Realization of complex logic functions through cascading micro resonators has been deterred by challenges involved in their interconnections and the large required array of resonators. This paper presents a micro electromechanical system MEMS resonator with multiple input (actuation) and output (detection) that enables the realization of complex logic operations. The devices are based on a compound resonator consisting of an in- plane clamped-guided arch beam that is mechanically coupled from its guided side to two flexure beams and to another T- shaped resonant beam. As examples, we experimentally demonstrate using the device to realize a half adder and a 1:2 DEMUX, based on electrothermal and electrostatic tuning of the arch beam and side resonant beam. The logic operation is frequency modulation. This paper demonstrates that with such compound MEMS resonators, it is possible to build more complex logic functionalities.
关键词： Multi-input and multi-output,half adder,DEMUX,electrostatic and electrothermal actuation,MEMS resonators
更新于2025-09-23 15:21:01
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Lasera??Induced Graphene for Electrothermally Controlled, Mechanically Guided, 3D Assembly and Humana??Soft Actuators Interaction
摘要： Mechanically guided, 3D assembly has attracted broad interests, owing to its compatibility with planar fabrication techniques and applicability to a diversity of geometries and length scales. Its further development requires the capability of on-demand reversible shape reconfigurations, desirable for many emerging applications (e.g., responsive metamaterials, soft robotics). Here, the design, fabrication, and modeling of soft electro-thermal actuators based on laser-induced graphene (LIG) are reported and their applications in mechanically guided 3D assembly and human-soft actuators interaction are explored. Over 20 complex 3D architectures are fabricated, including reconfigurable structures that can reshape among three distinct geometries. Also, the structures capable of maintaining 3D shapes at room temperature without the need for any actuation are realized by fabricating LIG actuators at an elevated temperature. Finite element analysis can quantitatively capture key aspects that govern electrothermally controlled shape transformations, thereby providing a reliable tool for rapid design optimization. Furthermore, their applications are explored in human-soft actuators interaction, including elastic metamaterials with human gesture-controlled bandgap behaviors and soft robotic fingers which can measure electrocardiogram from humans in an on-demand fashion. Other demonstrations include artificial muscles, which can lift masses that are about 110 times of their weights and biomimetic frog tongues which can prey insects.
关键词： human-soft actuators interaction,laser-induced graphene,electrothermal actuators,3D assembly
更新于2025-09-23 15:19:57
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Intrinsic elastic conductors with internal buckled electron pathway for flexible electromagnetic interference shielding and tumor ablation; ??·???è¤???±?ˉ???μè·ˉ?????????????????1??§?ˉ??????¨?o??????§??μ?￡??±?è?????è????¤???è??;
摘要： The elastic conductor is crucial in wearable electronics and soft robotics. The ideal intrinsic elastic bulk conductors show uniform three-dimensional conductive networks and stable resistance during large stretch. A challenge is that the variation of resistance is high under deformation due to disconnection of conductive pathway for bulk elastic conductors. Our strategy is to introduce buckled structure into the conductive network, by self-assembly of a carbon nanotube layer on the interconnecting micropore surface of a pre-strained foam, followed by strain relaxation. Both unfolding of buckles and flattening of micropores contributed to the stability of the resistance under deformation (2.0% resistance variation under 70% strain). Microstructural analysis and finite element analysis illustrated different patterns of two-dimensional buckling structures could be obtained due to the imperfections in the conductive layer. Applications as all-directional interconnects, stretchable electromagnetic interference shielding and electrothermal tumor ablation were demonstrated.
关键词： buckled structure,electrothermal tumor ablation,intrinsic elastic conductor,three-dimensional conductive network,electromagnetic interference shielding
更新于2025-09-23 15:19:57
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Nonlinear Electrothermal Model for Investigating Transient Temperature Responses of a Through-Silicon Via Array Applied With Gaussian Pulses in 3-D IC
摘要： In this paper, a through-silicon via (TSV) array under Gaussian pulse is studied comprehensively with a rigorous consideration of its electrothermal characteristics. To enhance the computational efficiency and reduce the memory cost, we develop a unified radial point interpolation method (RPIM) to handle these TSV electrothermal coupling problems. The comparison between the results of the proposed formulas and fine-grid finite-element method (FEM) shows that the RPIM has a very high accuracy and reduces computational time by up to 88% in comparison with the fine-grid FEM. The transient temperature responses are studied in detail for three layouts of single-layered TSV arrays with different silicon dioxide layer thicknesses and areas enclosed by TSVs. Furthermore, the two-layered TSV array structure including microbumps and RDLs is simulated electrothermally to verify the scalability of this method. Our work demonstrated the capability of addressing a large number of TSV arrays and the proposed method enables faster and more accurate electrothermal design of TSV-based 3-D ICs.
关键词： transient temperature,Electrothermal,through silicon vias (TSV),radial point interpolation method (RPIM),TSV array,Gaussian pulse
更新于2025-09-19 17:15:36
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[IEEE 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Daejeon, Korea (South) (2019.7.28-2019.8.1)] 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR
摘要： Low-cost LiDAR with long distance, high resolution, and stable laser scanning are needed for robotics and automobiles. This paper reports a large-aperture, 2-axis electrothermal MEMS mirror for LiDAR applications. The MEMS mirror has a mirror plate of 2 × 2.5 mm2 and an optical field view (FoV) of 15° by 12°. The beam divergence of 0.5 mrad is achieved with a 1.3-mm laser beam. The rotational scanning resonant mode is at 0.7 kHz, which is achieved by the meshed bimorph actuators with improved stiffness.
关键词： large aperture,LiDAR,electrothermal actuation,MEMS micromirror
更新于2025-09-16 10:30:52
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[IEEE 2019 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) - Boston, MA, USA (2019.5.29-2019.5.31)] 2019 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO) - Parallel Modeling Fully Coupled Multiphysics Process in Resistive Random Access Memory Array
摘要： A high-performance numerical is proposed for fully coupled electrothermal simulation of electrothermal effects in resistive switching random access memory (RRAM) arrays. To enhance its capability for fast solving large scale problem, a J parallel adaptive unstructured mesh infrastructure and domain decomposition method (DDM) based double-level parallel scheme is employed to implement a parallel simulator. The performance of the developed simulator is validated by comparing with that of COMSOL Multiphysics. Further, the influence of conductive filament (CF) shape in the RRAM arrays on their electrothermal characteristics are investigated and analyzed.
关键词： Electrothermal model,numerical modeling,resistive-switching random access memory (RRAM),thermal crosstalk,parallel simulator
更新于2025-09-16 10:30:52
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[IEEE 2019 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) - Ottawa, ON, Canada (2019.7.8-2019.7.12)] 2019 International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) - Multiscale Electrothermal Simulation of Quantum Cascade Laser Operation
摘要： Quantum cascade lasers (QCLs) are high-power coherent light sources in the midinfrared and terahertz parts of the electromagnetic spectrum. They are systems in which the electronic and lattice systems are far from equilibrium, strongly coupled to one another, and the problem bridges disparate spatial scales. We present our ongoing work on the far-from-equilibrium transport of charge and heat in QCLs.
关键词： Quantum cascade lasers,far-from-equilibrium,electrothermal simulation,multiphysics,multiscale
更新于2025-09-12 10:27:22
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FDTS‐Modified SiO <sub/>2</sub> /rGO Wrinkled Films with a Micro‐Nanoscale Hierarchical Structure and Anti‐Icing/Deicing Properties under Condensation Condition
摘要： Icing accretion on the surface of an aircraft not only increases the weight but also causes changes in the surface shape, so there is an urgent need for anti-icing/deicing without shutdown. Here, a graphene-based film with light weight, super-hydrophobicity, high electric heat, and durability, which has both anti-icing properties and electrothermal deicing capability, is proposed. The film is prepared with 1H,1H,2H,2H-perfluorodecyltrichlorosilane (FDTS)-modified SiO2/rGO wrinkles, and it has a micro-nanoscale hierarchical structure. Moreover, the superhydrophobic properties of the film can be controlled by adjusting the wrinkle size. Because of its good water repellency, the film can prevent and delay the freezing of water droplets at low temperatures. At ?10 °C, compared to a smooth rGO film, the icing time of 10 μL supercooled water droplet on the micro-nanoscale hierarchical structured film can be delayed by ≈8.3 times, and the ice adhension decreases greatly. In addition, the film exhibits high-efficiency electrothermal properties. At ?10 °C, under a low voltage of 15 V, the film can be heated rapidly to achieve rapid deicing and defrosting. The graphene-based micro-nanoscale hierarchical structure shows great potential in the field of sky anti-icing and real-time deicing.
关键词： anti-icing,defrosting,electrothermal,deicing,superhydrophobic
更新于2025-09-11 14:15:04
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Parallel Simulation of Fully Coupled Electrothermal Processes in Large-Scale Phase-Change Memory Arrays
摘要： Numerical simulation of fully coupled electrothermal processes in phase-change memory (PCM) arrays is performed in this article. For realizing the ability in simulating the electrothermal responses of large-scale PCM arrays, an in-house parallel simulator based on domain decomposition method (DDM) and time-domain finite element method (FETD) is developed, with its performance evaluated in terms of accuracy and scalability. Then, thermal crosstalk in the PCM array is investigated using the developed simulator, and a diamond layer is introduced to suppress thermal crosstalk. Furthermore, the scaling effects of PCM arrays on their electrothermal performance are examined. A scheme for multibit PCM design is proposed, and the electrothermal characteristics of proposed 2-bit PCM cells and arrays are studied numerically.
关键词： phase-change memory (PCM),multibit PCM,parallel computing,time-domain finite element method (FETD),Electrothermal simulation,thermal crosstalk
更新于2025-09-11 14:15:04
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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A Compact Omnidirectional Laser Scanner Based on an Electrothermal Tripod Mems Mirror for Lidar Please Leave
摘要： Low-cost LiDAR with compact omnidirectional 360° scanners are needed for automobiles and robotics. This paper reports a compact omnidirectional scanner based on an electrothermal MEMS mirror, in which a circular pattern is generated by a two-axis tripod electrothermal MEMS mirror at non-resonant mode combined with a cone mirror. Meanwhile the vertical scanning field of view (FoV) up to 8° is also achieved. Compared to other omnidirectional scanners based on motorized optomechanics, this MEMS-based omnidirectional scanner has the potential to greatly decrease the size, cost and power consumption for LiDAR.
关键词： LiDAR,Omnidirectional,Non-resonant scanning,Micromirror,Laser Scanner,Electrothermal acutator
更新于2025-09-11 14:15:04