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Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation
摘要： In this paper, a CO2 laser induced discharge plasma extreme ultraviolet (EUV) source experimental device was established. The optical emission spectroscopy was used to diagnose the characteristics of the plasma, and the evolution of electron temperature and electron density with time was obtained. The in?uence of discharge voltage on plasma parameters was analyzed and discussed. The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer. The EUV radiation intensity and conversion ef?ciency were discussed.
关键词： laser induced discharge plasma,extreme ultraviolet (EUV) radiation,electron temperature and density,optical emission spectroscopy
更新于2025-09-23 15:19:57
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Two-Electron Interference in Strong-Field Ionization of He by a Short Intense Extreme Ultraviolet Laser Pulse
摘要： Double ionization of helium by a single intense (above 1018 W=cm2) linearly polarized extreme ultraviolet laser pulse is studied by numerically solving the full-dimensional time-dependent Schr?dinger equation. For the laser intensities well beyond the perturbative limit, novel gridlike interference fringes are found in the correlated energy spectrum of the two photoelectrons. The interference can be traced to the multitude of two-electron wave packets emitted at different ionization times. A semianalytical model for the dressed two-photon double ionization is shown to qualitatively account for the interference patterns in the joint energy spectrum. Similar signatures of interferences between transient induced time-delayed ionization bursts are expected for other atomic and molecular multielectron systems.
关键词： strong-field ionization,two-electron interference,time-dependent Schr?dinger equation,double ionization,extreme ultraviolet laser pulse
更新于2025-09-19 17:13:59
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Calculation of the extreme-ultraviolet radiation conversion efficiency for a laser-produced tin plasma source
摘要： This article presents the calculation results on the conversion efficiency (CE) of 1.064 μm laser-produced plasmas (LPPs) extreme-ultraviolet (EUV) tin (Sn) light sources with the Gaussian and a triangular-flat-topped like laser pulse temporal shapes. The computational model includes a collisional-radiative model and 1D hydrodynamics code that predicts reported experimental and theoretical results on the CE of 1.064 μm and 10.6 μm LPP EUV sources with the planar and mass-limited spherical Sn targets. The calculations for the case of a spherical target reveal that an optimum triangular-flat-topped like laser pulse generates a higher CE compared to the Gaussian pulse, especially, for the longer laser pulse duration than ~30 ns. The study demonstrated that a rising intensity rate of the laser pulse has a vital role to optimize the CE as well as to prolong the in-band (13.5 ± 0.135 nm) spectral emission of a small Sn spherical target. The model predicts a ~30 ns rising time duration for a linearly increasing intensity of triangular-flat-topped 1.064 μm laser pulse is necessary to obtain a maximum CE with a typical ~40 μm diameter liquid Sn droplet.
关键词： Extreme-ultraviolet lithography,Collisional-radiative model,Laser-produced plasmas,Radiation-hydrodynamics,Highly-charged tin spectra
更新于2025-09-19 17:13:59
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Easy-handling minimum mass laser target scaffold based on sub-millimeter air bubble -An example of laser plasma extreme ultraviolet generation-
摘要： Low density materials can control plasma properties of laser absorption, which can enhance quantum beam generation. The recent practical extreme ultraviolet light (EUV) is the first industrial example of laser plasma source with low density targets. Here we propose an easy-handling target source based on a hollow sub-millimeter microcapsule fabricated from polyelectrolyte cationic and anionic surfactant on air bubbles. The lightweight microcapsules acted as a scaffold for surface coating by tin (IV) oxide nanoparticles (22–48%), and then dried. As a proof of concept study, the microcapsules were ablated with a Nd:YAG laser (7.1 × 1010 W/cm2, 1 ns) to generate 13.5 nm EUV relatively directed to laser incidence. The laser conversion efficiency (CE) at 13.5 nm 2% bandwidth from the tin-coated microcapsule (0.8%) was competitive compared with bulk tin (1%). We propose that microcapsule aggregates could be utilized as a potential small scale/compact EUV source, and future quantum beam sources by changing the coating to other elements.
关键词： extreme ultraviolet light,tin oxide nanoparticles,Nd:YAG laser,microcapsule,low density materials,laser plasma
更新于2025-09-19 17:13:59
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Resonance Enhancement in Laser-Produced Plasmas (Concepts and Applications) || Front Matter
摘要： The motivation in writing this book is to show the most recent findings of newly emerged field of resonance-enhanced high-order harmonic generation (HHG) using the laser pulses propagating through the narrow and extended laser-produced plasma plumes. It becomes obvious that the developments in this field are aimed for improvement of harmonic yield through precise study of resonance effects during fine-tuning of driving pulses to the resonances. The purpose of writing this book is to acquaint the readers with the most advanced, recently developed methods of plasma harmonics generation at the conditions of coincidence of some harmonics, autoionizing states, and some ionic transitions possessing strong oscillator strengths. This book demonstrates how one can improve the plasma harmonic technique using this approach.
关键词： extreme ultraviolet,plasma harmonics,laser-produced plasmas,high-order harmonic generation,resonance enhancement,XUV,nonlinear optics,HHG
更新于2025-09-19 17:13:59
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Emission Properties of Laser Plasma Excited on Molecular-Cluster Carbon Dioxide Jets
摘要： We report on the results of investigation of a gas-jet laser-plasma source of extreme ultraviolet radiation based on a conical supersonic nozzle. As a target, we used molecular-cluster CO2 jets. Different regimes of the gas flow were obtained by varying the gas parameters at the gas inlet and the influence of these regimes on the emission and technical characteristics of the radiation source was analyzed. It has been shown experimentally that radiation emission is intensified upon an increase in the amount of clustered material in the jet.
关键词： EUV radiation intensity,extreme ultraviolet radiation,gas-jet target,molecular-cluster CO2 jets,laser-plasma source
更新于2025-09-16 10:30:52
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[IEEE 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Munich, Germany (2019.6.23-2019.6.27)] 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Cavity-Enhanced Noncollinear High-Harmonic Generation
摘要： The generation of extreme-ultraviolet (XUV) attosecond pulse trains (APTs) by the process of high harmonic generation (HHG) has enabled the investigation of electronic dynamics in atoms, molecules and solids. Enhancing the pulse energy impinging on the target gas by usually one to two orders of magnitude by means of an external, passive resonator (enhancement cavity, EC) permits efficient HHG at repetition rates exceeding 10 MHz, enabling applications in XUV precision spectroscopy and space-charge-limited regimes of photoelectron or coincidence spectroscopy.
关键词： attosecond pulse trains,high harmonic generation,extreme-ultraviolet,XUV precision spectroscopy,enhancement cavity
更新于2025-09-16 10:30:52
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[IEEE 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Munich, Germany (2019.6.23-2019.6.27)] 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Ultrafast Extreme-Ultraviolet Photoemission Spectroscopy at 18.4 MHz
摘要： In the past two decades, attosecond science has led to important insights into ultrafast electron dynamics. Whilst extreme-ultraviolet (XUV) photon flux attained from high harmonic generation (HHG) has increased significantly over this time, space-charge effects limit the maximum allowable number of photons per pulse for many attosecond experiments, especially in multidimensional – i.e., either angularly (ARPES) or spatially (PEEM) resolved – photoelectron spectroscopy (PES) on solids [1,2]. To allow for higher average flux without increasing space-charge impairments, HHG sources at higher repetition rates are needed. We combine a fibre-based ytterbium amplifier system with 4.5-μJ, 40-fs and 1030-nm pulses at 18.4 MHz repetition rate with intra-cavity HHG with an enhancement of 35 (Fig. 1a). Geometric output coupling through a pierced mirror affords high photon energies of 25-60 eV at a flux of 9×1012 XUV photons per second [3], which is unprecedented at this photon energy and MHz repetition rates. The HHG beam is focused on a tungsten target and the generated photoelectrons are detected by an angle-resolving time-of-flight (ToF) spectrometer. Simultaneous stabilization of cavity length and oscillator repetition rate result in excellent intensity stability of the system and enable long-term measurements with three orders of magnitude less integration time at equal space charge conditions in comparison to state-of-the-art kHz HHG sources. An evaluation of the photoelectron statistics of the setup by observing the temporal evolution of the relative standard deviation σ of the photoelectron spectrum proves the aptitude of our setup for high-precision, long-term PES experiments, with a statistical behaviour for up to 3×109 shots (see Fig. 1b). By measuring photoelectron spectra at different XUV flux, we show that no space charge within the instrumental resolution of 0.3 eV can be observed in a 10-μm-diameter focus spot. Our experiments reveal the XUV-IR-delay dependence of sidebands in the photoelectron spectrum generated by laser-assisted photoemission. This represents the first measurement with attosecond precision at MHz repetition rate.
关键词： High Harmonic Generation,Extreme-Ultraviolet,Ultrafast,Photoemission Spectroscopy,MHz repetition rates
更新于2025-09-16 10:30:52
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Single-walled carbon nanotube membranes for optical applications in the extreme ultraviolet range
摘要： In this paper, we explore the possibility of using free-standing thin films from single-walled carbon nanotube (SWCNT) material in optics of the extreme ultraviolet (EUV) range. Test samples were fabricated using an aerosol chemical vapor deposition method. Synchrotron radiation was used to record the transmittance spectra of samples in the EUV range. The measured transmittance for a film 40 nm thick almost monotonously increases from 76% at a wavelength of 20 nm to 99% at a wavelength of 1 nm. The measured stress-strain curve for the test samples shows that the SWCNT-based thin films have rather high ductility as opposite to fragile films made of conventional solid state materials. We use numerical simulations to demonstrate that the film strain occurs mainly by straightening and sliding of the nanotubes past each other without forming of strain localization responsible for fragile behavior. The combination of high radiation transmittance and unique mechanical properties makes the SWCNT-based thin films very promising for use in the EUV optics. In particular, such films can be used to protect delicate optical elements for EUV lithography from their contamination with debris particles.
关键词： Transmittance,Optics,Single-walled carbon nanotubes,Extreme ultraviolet,Mechanical properties
更新于2025-09-16 10:30:52
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High Energy and Short Pulse Lasers || Phase Manipulation of Ultrashort Soft X-Ray Pulses by Reflective Gratings
摘要： In this chapter, we discuss the use of reflective diffraction gratings to manipulate the phase of ultrashort pulses in the extreme ultraviolet (XUV) and soft X-ray spectral regions. Gratings may be used to condition the spectral phase of ultrashort pulses, e.g., to compensate for the pulse chirp and compress the pulse, similarly to what is routinely realized for visible and infrared pulses. The chirped pulse amplification technique has been already proposed for soft X-ray free-electron laser radiation; however, it requires the use of a compressor to compensate for the pulse chirp and get closer to the Fourier limit. There are fundamental differences when operating the gratings at wavelengths shorter than ≈40 nm on a broad band: (a) the gratings are operated at grazing incidence; therefore, the optical design has to be consequently tailored to this peculiar geometry; (b) the grating efficiency is definitely lower; therefore, the number of diffractions has to be limited to two. We discuss the different configurations that can be applied to the realization of a grating stretcher/compressor.
关键词： extreme ultraviolet,soft X-ray optics,ultrafast optics,diffraction gratings,chirped pulse amplification
更新于2025-09-16 10:30:52