Efficient micro processing with high power femtosecond lasers by beam engineering and modelling

摘要： Hybrid femtosecond lasers today deliver output powers of several hundred watts. Translating the available power into high-speed micromachining requires new approaches such as beam delivering tools with suitable synchronization of the laser pulses. We study the interest of rapid scanning systems or multi-beam shaping but also a rapid estimation of the ablation efficiency using a simple engineering model.