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[Springer Theses] CMOS-Compatible Key Engineering Devices for High-Speed Silicon-Based Optical Interconnections || CMOS-Compatible Efficient Fiber-to-Chip Coupling
摘要： In this chapter, we study the fiber-to-chip coupling problem in silicon-based optical interconnections. It mainly includes: 1. We have designed and demonstrated a series of fully CMOS-compatible single-tip inverse tapers for edge coupling. We use the SiO2 gap and deep etching method between the taper tip and the edge of the chip to process the high-quality taper tip, and study the effect of the design parameters on the coupling efficiency. We found that the device length has a obvious effect on the device coupling loss, mainly due to the large waveguide propagation loss. Finally, for a inverse taper with a taper tip width of 0.16 μm and a length of 40 μm, the coupling loss of TE and TM at the wavelength of 1550 nm are 1.13 dB/facet and 1.81 dB/facet respectively. The ?1 dB bandwidth is larger than 180 nm. 2. We designed and demonstrated an ultra-compact polarization-insensitive optical combiner. The working principle is based on the two-mode interference. The length of the device is only 5.1 μm, and the excess loss of the two polarizations is both less than 0.1 dB. 3. We designed and demonstrated a novel double-tip inverse taper which consists of two inverse tapers and an ultra-compact polarization-insensitive optical combiner. We have studied the effect of design parameters on coupling loss. And a edge coupler with only 40 μm length is proved. When the wavelength is 1550 nm, the coupling loss for TE and TM are 1.10 dB/facet and 1.52 dB/facet respectively, and the ?1 dB bandwidth is more than 160 nm. Its processing is completely CMOS compatible, and it can be further optimized by the previous multi-layer, multi-stage and cantilever technology.
关键词： double-tip inverse taper,polarization-insensitive optical combiner,fiber-to-chip coupling,inverse tapers,CMOS-compatible,silicon-based optical interconnections,two-mode interference
更新于2025-09-10 09:29:36
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[Springer Theses] CMOS-Compatible Key Engineering Devices for High-Speed Silicon-Based Optical Interconnections || Summary and Future Work
摘要： This dissertation mainly focuses on four important scientific problems in silicon photonics, i.e., silicon electro-optic modulator, advanced multiplexing mechanism, polarization controlling and fiber-to-chip coupling. It systematically puts forward the design theory of silicon electro-optic modulator, investigates advanced multiplexing mechanisms, studies polarization-controlling devices, and explores fiber-to-chip coupling techniques. The research demonstrates high-performance devices fabricated with commercial 130 nm CMOS process, including a high-speed carrier-depletion silicon electro-optic modulator, WDM devices, PDM devices, MDM devices, and ultra-compact polarization splitter-rotators. The work aims to contribute to the field of silicon photonics by providing CMOS-compatible solutions for high-speed silicon-based optical interconnections.
关键词： multiplexing mechanism,CMOS-compatible,fiber-to-chip coupling,polarization controlling,electro-optic modulator,silicon photonics
更新于2025-09-10 09:29:36