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Electrical characterization of single nanometer-wide Si fins in dense arrays
摘要： This paper demonstrates the development of a methodology using the micro four-point probe (μ4PP) technique to electrically characterize single nanometer-wide fins arranged in dense arrays. We show that through the concept of carefully controlling the electrical contact formation process, the electrical measurement can be confined to one individual fin although the used measurement electrodes physically contact more than one fin. We demonstrate that we can precisely measure the resistance of individual ca. 20 nm wide fins and that we can correlate the measured variations in fin resistance with variations in their nanometric width. Due to the demonstrated high precision of the technique, this opens the prospect for the use of μ4PP in electrical critical dimension metrology.
关键词： micro four-point probe,electrical characterization,finFET,sheet resistance,critical dimension metrology
更新于2025-09-23 15:22:29
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AIP Conference Proceedings [AIP Publishing 15th International Conference on Concentrator Photovoltaic Systems (CPV-15) - Fes, Morocco (25–27 March 2019)] 15th International Conference on Concentrator Photovoltaic Systems (CPV-15) - Accurate contact and contactless methods for emitter sheet resistance testing of PV wafers
摘要： The emitter sheet resistance Rs e on textured silicon wafers is measured by four-point-probe (4PP), eddy-current, and junction-photovoltage (JPV) techniques. In the sample set – manufactured for this study – Rs e of diffused n++ and p++ layers and the bulk resistivity ρ of the substrate wafers are all varied to cover the entire range of today’s silicon PV production. It was found, that the 4PP results – from the widely used 4PP sensor with sharp and hard tips – are strongly influenced by the bulk resistivity of the substrate wafers and show poor correlation to the readings of the contactless techniques. In addition, 4PP probes with different tip parameters provide different Rs e values. A simple model is proposed to explain the influence of ρ to the measured Rs e. This new understanding led to the application of a simple design “soft contact” 4PP sensor, which provides a bulk resistivity independent determination of Rs e. Results from the soft-contact 4PP sensor are in excellent agreement with Rs e calculated from the eddy-current method. This agreement confirms the accuracy of the soft-probe 4pp technique. Knowing the precise Rs e values of all wafers enabled the optimization of the measurement parameters of the recently developed contactless, differential JPV sensor, which is already used in PV production lines. After optimization, the differential JPV measurement was proven to be very precise for the entire sample parameter range.
关键词： four-point-probe,junction-photovoltage,emitter sheet resistance,eddy-current,PV wafers
更新于2025-09-11 14:15:04
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Anisotropic conductivity of Cellulose-PEDOT:PSS composite materials studied with a generic 3D four-point probe tool
摘要： The conductive polymer poly(3,4-ethylenedioxythiphene):poly(styrenesulfonate) (PEDOT:PSS) is widely used in organic electronics and printed electronics due to its excellent electronic and ionic conductivity. PEDOT:PSS films exhibit anisotropic conductivities originating from the interplay of film deposition processes and chemical structure. The previous studies found that high boiling point solvent treated PEDOT:PSS exhibits an anisotropy of 3 to 4 orders magnitude. Even though both the in-plane and out-of-plane conductivities are important for the device performance, the out-of-plane conductivity is rarely studied due to the complexity with the experiment procedure. Cellulose-based paper or films can also exhibit anisotropic behavior due to the combination of their intrinsic fibric structure and film formation process. We have previously developed a conductive paper based on PEDOT:PSS and cellulose which could be used as the electrodes in energy storage devices. In this work we developed a novel measurement set-up for studying the anisotropy of the charge transport in such composite materials. A tool with two parallel plates mounted with spring loaded probes was constructed enabling probing both lateral and vertical directions and resistances from in-plane and out-of-plane directions to be obtained. The measurement results were then input and analyzed with a model based on a transformation method developed by Montgomery, and thus the in-plane and out-of-plane conductivities could be detangled and derived. We also investigated how the conductivity anisotropy depends on the microstructure of the cellulose template onto which the conductive polymer self-organizes. We show that there is a relatively small difference between the in-plane and out-of-plane conductivities which is attributed to the unique 3D-structure of the composites. This new knowledge gives a better understanding of the possibilities and limitations for using the material in electronic and electrochemical devices.
关键词： Cellulose,PEDOT:PSS,composite material,anisotropic conductivity,four-point probe
更新于2025-09-04 15:30:14