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Crosslinked Organosilicon-Acrylate Copolymer Moisture Barrier Thin Film Fabricated by Initiated Chemical Vapor Deposition (iCVD)
摘要: Crosslinked organosilicon-acrylate copolymer thin film with desired chemical composition was successfully fabricated by a simply modified initiated chemical vapor deposition (iCVD) process. Unlike the conventional iCVD copolymerization process, in our novel process, comonomers were injected together as one gas phase into the polymerization chamber from miscible liquid comonomer mixture. 2,4,6,8-tetramethyl-2,4,6,8-tetravinylcyclotetrasiloxane (V4D4) and cyclohexyl methacrylate (CHMA) were used as the comonomers and tert-butyl peroxide was used as the initiator. From Fourier transform infrared (FTIR) spectra and solvent resistance test, we clearly confirmed that the crosslinked copolymer thin film with desired chemical composition could be obtained by controlling only the mixing ratio of liquid comonomers. It is expected that crosslinkable V4D4 organosilicon moiety provides hydrophobic moisture barrier property and CHMA acrylate moiety provides mechanical flexibility and better adhesion. We observed a certain level of moisture blocking capability of the copolymer thin film, implying potential application of the crosslinked organosilicon-acrylate copolymer thin film as flexible polymer buffer layer in organic/inorganic or metal oxide hybrid moisture barrier for flexible display or electronic devices.
关键词: moisture barrier property,copolymer thin film,initiated chemical vapor deposition (iCVD),cyclohexyl methacrylate (CHMA),2,4,6,8-tetramethyl-2,4,6,8-tetravinylcyclotetrasiloxane (V4D4)
更新于2025-09-23 15:21:21
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Thickness-Dependent Swelling Behavior of Vapor-Deposited Smart Polymer Thin Films
摘要: In this contribution, the temperature-dependent swelling behavior of vapor-deposited smart polymer thin films is shown to depend on cross-linking and deposited film thickness. Smart polymers find application in sensor and actuator setups and are mostly fabricated on delicate substrates with complex nanostructures that need to be conformally coated. As initiated chemical vapor deposition (iCVD) meets these specific requirements, the present work concentrates on temperature-dependent swelling behavior of iCVD poly(N-isopropylacrylamide) thin films. The transition between swollen and shrunken state and the corresponding lower critical solution temperature (LCST) was investigated by spectroscopic ellipsometry in water. The films’ density in the dry state evaluated from X-ray reflectivity could be successfully correlated to the position of the LCST in water and was found to vary between 1.1 and 1.3 g/cm3 in the thickness range 30?330 nm. This work emphasizes the importance of insights in both the deposition process and mechanisms during swelling of smart polymeric structures.
关键词: X-ray reflectivity,spectroscopic ellipsometry,vapor-deposited,smart polymers,iCVD,LCST,film thickness,swelling behavior,cross-linking
更新于2025-09-11 14:15:04