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Site-controlled formation of single Si nanocrystals in a buried SiO <sub/>2</sub> matrix using ion beam mixing
摘要： For future nanoelectronic devices – such as room-temperature single electron transistors – the site-controlled formation of single Si nanocrystals (NCs) is a crucial prerequisite. Here, we report an approach to fabricate single Si NCs via medium-energy Si+ or Ne+ ion beam mixing of Si into a buried SiO2 layer followed by thermally activated phase separation. Binary collision approximation and kinetic Monte Carlo methods are conducted to gain atomistic insight into the influence of relevant experimental parameters on the Si NC formation process. Energy-filtered transmission electron microscopy is performed to obtain quantitative values on the Si NC size and distribution in dependence of the layer stack geometry, ion fluence and thermal budget. Employing a focused Ne+ beam from a helium ion microscope, we demonstrate site-controlled self-assembly of single Si NCs. Line irradiation with a fluence of 3000 Ne+/nm2 and a line width of 4 nm leads to the formation of a chain of Si NCs, and a single NC with 2.2 nm diameter is subsequently isolated and visualized in a few nanometer thin lamella prepared by a focused ion beam (FIB). The Si NC is centered between the SiO2 layers and perpendicular to the incident Ne+ beam.
关键词： phase separation,Monte Carlo simulations,single electron transistor,ion beam mixing,helium ion microscopy
更新于2025-11-21 11:20:48
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[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Structural evolution of polycrystalline tungsten tips with palladium oxide reservoirs
摘要： We present herein a method to prepare thermodynamically stable tungsten (W) nanopyramids. First, the sides of a W needle are coated with a collodion containing powdered palladium oxide. The W needle is subsequently annealed under ultrahigh vacuum to adsorb palladium (Pd) atoms onto the apex of the W needle via surface diffusion and thereby produce a W nanotip coated with a monolayer Pd film. Field ion microscopy reveals that {111} planes of the W nanotip are contracted by faceting the {211} planes surrounding the {111} plane. This structural change is analogous to the formation of three-sided W nanopyramids. The W nanopyramids appear generally the same as the existing nanopyramids. However, as opposed to the existing nanopyramids, the tip of the proposed nanopyramids does not comprise a single atom.
关键词： faceting,nanotip,palladium oxide,field emission,palladium,tungsten,field ion microscopy
更新于2025-09-23 15:21:21
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Defect Localization and Nanofabrication for Conductive Structures with Voltage Contrast in Helium Ion Microscopy
摘要： As the dimensions of feature sizes in electronic devices decrease to nanoscale, an easy method for failure analysis and evaluation of processing steps is required. Gallium focused ion beam (Ga-FIB) or scanning electron microscope (SEM) are efficient approaches to detect voltage contrast for addressing failure analysis in semiconductor devices and processing. However, Ga-FIB may cause damage or implantation to the surface of the analyzed area, and its resolution is low. Helium ion microscopy (HIM) uses a light ion beam (helium or neon) for imaging and fabrication in nanoscale. With passive voltage contrast (PVC) in HIM images, the defect localization for failure of conductive structures can be rapidly and easily detected with sufficient voltage contrast. Furthermore, a defect gap as narrow as sub 10-nm can be investigated with HIM imaging. PVC with HIM is an efficient method for defect localization at nanoscale with minimal damage to the analyzed area. For circuit edit and failure analysis, it may be necessary to intentionally cut the conductive connection. In this circumstance, final results can be easily verified using PVC imaging with HIM. With XeF2 gas assistance, both helium and neon ion beams can be used to perform nanofabrication for metal disconnection. XeF2 gas plays an important role in preventing deposition of conductive materials on etching region and enhancing material removal rates to achieve electrically isolated structures. The etching rate with a neon ion beam is much faster than that of a helium ion beam. PVC in HIM images with controllable operation and dimensions using a helium ion beam with XeF2 gas assistance could also be used to localize a hidden defect for a single-location-defect situation. With neon ion beam irradiation on a defective location, PVC can be used to find the defect locations in the case of a series of defects.
关键词： defect,voltage contrast,XeF2,focused ion beam,etching,helium ion microscopy,nanofabrication
更新于2025-09-19 17:15:36
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Helium focused ion beam direct milling of plasmonic heptamer-arranged nanohole arrays
摘要： We fabricate plasmonic heptamer-arranged nanohole (HNH) arrays by helium (He) focused ion beam (HeFIB) milling, which is a resist-free, maskless, direct-write method. The small He+ beam spot size and high milling resolution achieved by the gas field-ionization source used in our HeFIB allows the milling of high aspect ratio (4:1) nanoscale features in metal, such as HNHs incorporating 15 nm walls of high verticality between holes in a 55-nm-thick gold film. Drifts encountered during the HeFIB milling of large arrays, due to sample stage vibrations or He beam instability, were compensated by a drift correction technique based on in situ He ion imaging of alignment features. Our drift correction technique yielded 20 nm maximum dislocation of HNHs, with 6.9 and 4.6 nm average dislocations along the horizontal and vertical directions, respectively. The measured optical resonance spectra of the fabricated plasmonic HNH arrays are presented to support the fabrication technique. Defects associated with HeFIB milling are also discussed.
关键词： plasmonics,focused ion beam,helium ion microscopy,nanofabrication
更新于2025-09-12 10:27:22
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Correlated Materials Characterization via Multimodal Chemical and Functional Imaging
摘要： Multimodal chemical imaging simultaneously offers high resolution chemical and physical information with nanoscale, and in select cases atomic resolution. By coupling modalities that collect physical and chemical information, we can address scientific problems in biological systems, battery and fuel cell research, catalysis, pharmaceuticals, photovoltaics, medicine and many others. The combined systems enable local correlation of material properties with chemical makeup, making fundamental questions in how chemistry and structure drive functionality approachable. In this review we present recent progress and offer a perspective for chemical imaging used to characterize a variety of samples by a number of platforms. Specifically, we present cases in infrared and Raman spectroscopies combined with scanning probe microscopy; optical microscopy and mass spectrometry; nonlinear optical microscopy; and finally, ion, electron and probe microscopies with mass spectrometry. We also discuss the challenges associated with the use of data originated by the combinatorial hardware, analysis, and machine learning as well as processing tools necessary for interpretation of multidimensional data acquired from multimodal studies.
关键词： raman spectroscopy,ion microscopy,nonlinear optical microscopy,mass spectrometry,electron microscopy,infrared spectroscopy,chemical imaging,scanning probe microscopy,data analytics,optical microscopy
更新于2025-09-10 09:29:36
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Characteristics of krypton ion emission from a gas field ionization source with a single atom tip
摘要： A scanning ion beam instrument equipped with a gas ?eld ionization source (GFIS) has been commercialized, but only helium and neon are currently available as GFISs. The characteristics of krypton ion emission from a single atom tip (SAT) have not been reported yet. In this study, the characteristics of krypton ion emission were investigated by ?eld ion microscopy. At 65 K, the krypton ion emission current reached approximately 40 pA, which is 1 order of magnitude higher than that at 130 K. As the krypton gas pressure was increased, the krypton ion current increased. At a pressure of 0.3 Pa, the emission current was anticipated to reach 200 pA, which may be high enough for nanofabrication. The variation of the krypton ion current was as low as 5% in one hour. We concluded that a krypton ion beam instrument equipped with a GFIS will be a powerful tool for nanofabrication.
关键词： gas field ionization source,field ion microscopy,nanofabrication,single atom tip,krypton ion emission
更新于2025-09-09 09:28:46
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Carbon Nanomembranes
摘要： This chapter describes the formation and properties of one nanometer thick carbon nanomembranes (CNMs), made by electron induced cross-linking of aromatic self-assembled monolayers (SAMs). The cross-linked SAMs are robust enough to be released from the surface and placed on solid support or over holes as free-standing membranes. Annealing at ~1000K transforms CNMs into graphene accompanied by a change of mechanical stiffness and electrical resistance. The developed fabrication approach is scalable and provides molecular level control over thickness and homogeneity of the produced CNMs. The mechanisms of electron-induced cross-linking process are discussed in details. A variety of polyaromatic thiols: oligophenyls as well as small and extended condensed polycyclic hydrocarbons have been successfully employed, demonstrating that the structural and functional properties of the resulting nanomembranes are strongly determined by the structure of molecular monolayers. The mechanical properties of CNMs (Young’s modulus, tensile strength and prestress) are characterized by bulge testing. The interpretation of the bulge test data relates the Young’s modulus to the properties of single molecules and to the structure of the pristine SAMs. The gas transport through the CNM is measured onto polydimethylsiloxane (PDMS) - thin film composite membrane. The established relationship of permeance and molecular size determines the molecular sieving mechanism of permeation through this ultrathin sheet.
关键词： Helium Ion Microscopy,radiation induced cross-linking,Self-Assembled Monolayer,Carbon Nanomembrane (CNM),Graphene
更新于2025-09-04 15:30:14