[IEEE 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Paris, France (2018.7.8-2018.7.13)] 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Accurate Measurement at the Nanoscale of Remnant Polarisation Charge in Ferroelectric Films

摘要： A method for the measurement of the remnant polarisation charge of ferroelectric ?lms at the nanoscale is proposed. It is based on current measurement by an atomic force microscope and imposes a capacitive correction in order to extract the signal from the noise, several orders of magnitude higher than the signal to be measured. A remnant charge of 4.2 fC could be measured on a PbZrTiO3 thin ?lm. Solutions to decrease the noise are proposed.