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Modular Ceramic-Polymeric Device for Analysis of Selected Elements in Liquid Using Microplasma
摘要： Miniaturization of devices for analysis of chemical composition is being still developed. In this article we present a portable device with a microplasma excitation source. The microdischarge is ignited inside a ceramic structure between a solid anode and a liquid cathode. As a result of cathode sputtering of the solution, it is possible to determine its chemical specimens by analysis of emission spectra of the microdischarge. We fabricated cathodes with a microfluidic compartment and two types of anodes. Devices were tested experimentally. Spectroscopic properties of the microdischarge and its analytical performance depended on the used ceramic structure, the surface area of the cathode aperture and the flow rate of the solution.
关键词： optical emission spectroscopy,microplasma,LTCC
更新于2025-09-23 15:23:52
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Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering
摘要： Discharge behaviors of high-power impulse magnetron sputtering with different targets have been investigated. Distinct current–voltage curves and target current waveforms are observed. Breakdown voltage and the maximum target current show a periodic drop with the increase of atomic number in subgroups and periods. The target current density is found to be mainly affected by the secondary electron emission yield. Thus, its magnitude is unable to directly evaluate the ionization degree of sputtered atoms in high-power impulse magnetron sputtering (HiPIMS) process. In this paper, the interactive influence of secondary electron emission, sputter yield, and ionization energy on the ionization degree of sputtered atoms is discussed based on the analysis of the voltage and current characteristics. As a result, targets can be categorized into three sorts according to the ionization degree: 1) low ionization degree targets, such as Ag and C less than 10%; 2) intermediate ionization degree targets like Cr and Cu with 55% and 35%; 3) Ti, Zr, and Mo targets with the second ionization processes. These results provide institutive operation ranges for the state-of-the-art HiPIMS applications.
关键词： optical emission spectroscopy (OES),ionization degree,Current waveform,gas breakdown,high-power impulse magnetron sputtering (HiPIMS)
更新于2025-09-23 15:22:29
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Spectroscopic Studies of Magnetron Sputtering Plasma Discharge in Cu/O2/Ar Mixture for Copper Oxide Thin Film Fabrication
摘要： Magnetron sputtering plasma for the deposition of copper oxide thin film has been investigated using optical emission spectroscopy and Langmuir probe. The intensity of the light emission from atoms and radicals in the plasma were measured using optical emission spectroscopy (OES). Then, Langmuir probe was employed to estimate the plasma density, electron temperature and ion flux. In present studies, reactive copper sputtering plasmas were produced at different oxygen flow rate of 0, 4, 8 and 16 sccm. The size of copper target was 3 inches. The dissipation rf power, Ar flow rate and working pressure were fixed at 400 W, 50 sccm and 22.5 mTorr, respectively. Since the substrate bias plays an important role to the thin film formation, the substrate bias voltages of 0, -40, -60 and -100 V were studied. Based on OES results, oxygen emission increased drastically when the oxygen flow rate above 8 sccm. On the other hand, copper and argon emission decreased gradually. In addition, Langmuir probe results showed a different ion flux when substrate bias voltage was applied. Based on these plasma diagnostic results, it has been concluded that the optimized parameter to produce copper oxide thin film are between -40 to -60 V of substrate bias voltage and between 8 to 12 sccm of oxygen flow rate.
关键词： optical emission spectroscopy,Langmuir probe,thin film,magnetron sputtering,Copper oxide
更新于2025-09-23 15:22:29
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3D spectroscopic measurement of argon and metal vapour in MIG welding
摘要： Spectroscopic measurements for gas-metal arc (GMA) phenomena have been recently performed. The studies have reported that the metal vapour behaviour greatly affects the arc properties. However, they can be applied only to axially symmetric phenomena because of the assumption used for the measurement. GMA welding are normally performed with a travel speed, and most of the phenomena become axially asymmetric. This study constructed the simultaneous and multidirectional measurement system by 12 CCD cameras which can capture such axially asymmetric GMA phenomena. We measured the metal inert gas welding process with use of two types of narrowband interference filters for Ar I and Fe I during the one measurement, and observed axially asymmetrical intensity distributions in the globular and the spray transfer mode. We found that the globular transfer mode that is seemingly chaotic distribution can be regarded as the distribution where the deviation of Ar I is larger than Fe I from the axially symmetric double-ring distribution that consists of Ar I and Fe I.
关键词： image reconstruction,ML-EM method,CCD camera,globular transfer,interference filter,axially asymmetrical arc plasma,spray transfer,Optical emission spectroscopy
更新于2025-09-23 15:21:21
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Effect of Ga introduction during the second stage of a coevaporation process of Cu(In,Ga)Se2 layers at low temperature on polyimide substrates
摘要： A proper control of Ga concentration pro?le is mandatory to achieve high e?ciency Cu(In,Ga)Se2 (CIGS) solar cells. At low temperature, deep gradients, detrimental for carriers' di?usion, are obtained when CIGS is deposited with a standard three-stage process: an optimization of the process is needed. In this study, we show the impact of a modify three-stage process on the depth of the notch by introducing Ga ?ux during the second stage from 0 nm/min to 1.1 nm/min. A higher open circuit voltage compensated by a lower short current density is obtained due to higher band gap energy. The surface and the bulk of the CIGS layer was analyzed at the end of the second stage by coupling di?erent characterization techniques: glow discharge optical emission spectroscopy, Raman and X-ray photoelectrons spectroscopy. The presence of binary compounds as well as a Ga enrichment at the end of the second stage are observed when Ga is introduced during the second stage.
关键词： low temperature,X-ray photoelectron spectroscopy,solar cells,Cu(In,Ga)Se2,three-stage process,glow discharge optical emission spectroscopy,Raman spectroscopy,CIGS,Ga concentration pro?le
更新于2025-09-23 15:21:01
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Time-resolved optical characterization of the interaction between a laser produced plasma and a spark discharge
摘要： The interaction between a nanosecond laser produced plasma and a unipolar high voltage discharge was analyzed using time-resolved spectroscopy, fast photography with narrow band interference filters and profilometry. Here the laser ablation fluence was varied in the 60–1000 J/cm2 range. The 600-kW electrical discharge was triggered by an ablation plasma on the aluminum target at time 700 ns in order to enhance the laser-induced breakdown spectroscopy (LIBS) emission. Most of the spectra were obtained from a spot 1 mm above the target and these were: time-integrated to gauge overall enhancement and time-resolved to investigate emission enhancement, temperature and density as a function of time. It was found that the time-and-space integrated LIBS signal was enhanced by up to one order of magnitude at the lowest laser fluence employed when compared with a conventional LIBS experiment. Also, that this emission increment could not be mainly attributed to an increased mass removal, but rather to an enhancement of plasma ionization degree as was observed by means of fast photography with filters. This causes longer plasma duration and more enhancement of ionic species than neutrals. It was also found that both the electronic density and the temperature increase when the spark discharge is applied, in comparison with the ablation plasma. Emission enhancement is inversely proportional to laser fluence due to the fact that for higher fluences, by the time the discharge is applied, the laser-produced plasma is already highly excited.
关键词： LIBS,Spark discharge,Optical emission spectroscopy,Plume dynamics,Fast photography
更新于2025-09-23 15:21:01
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Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation
摘要： In this paper, a CO2 laser induced discharge plasma extreme ultraviolet (EUV) source experimental device was established. The optical emission spectroscopy was used to diagnose the characteristics of the plasma, and the evolution of electron temperature and electron density with time was obtained. The in?uence of discharge voltage on plasma parameters was analyzed and discussed. The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer. The EUV radiation intensity and conversion ef?ciency were discussed.
关键词： laser induced discharge plasma,extreme ultraviolet (EUV) radiation,electron temperature and density,optical emission spectroscopy
更新于2025-09-23 15:19:57
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Expansion dynamics and chemistry evolution in ultrafast laser filament produced plasmas
摘要： Laser ablation in conjunction with optical emission spectroscopy is a potential non-contact, standoff detection method for all elements in the periodic table and certain isotopes such as radionuclides. Currently, significant development efforts are on-going to use ultrafast laser filaments for remote detection of materials. The application of filaments is of particular interest in extending the range of stand-off capability associated with elemental and isotopic detection via laser-induced breakdown spectroscopy. In this study, we characterize the expansion dynamics and chemical evolution of filament-produced uranium (U) plasmas. Laser filaments are generated in the laboratory by loosely focusing 35 femtosecond (fs), 6 milli Joule (mJ) pulses in air. Two-dimensional spectrally-integrated and time-resolved imaging was performed to study hydrodynamics and evolution of U atomic and UO molecular emission in filament-produced U plasmas. Our results highlight that filament ablation of U plasmas gives a cylindrical plasma plume morphology with an appearance of plume splitting into slow and fast moving components at later times of its evolution. Emission from the slow-moving region shows no distinct spectral features (i.e. broadband-like) and is contributed in part by nanoparticles generated during ultrafast laser ablation. Additionally, we find U atoms and U oxide molecules (i.e. UO, UxOy) co-exist in the filament produced plasma, which can be attributed to the generation of low-temperature plasma conditions during filament ablation.
关键词： optical emission spectroscopy,Laser ablation,plasma chemistry,ultrafast laser filaments,uranium plasmas
更新于2025-09-23 15:19:57
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Determination of atomic oxygen state densities in a double inductively coupled plasma using optical emission and absorption spectroscopy and probe measurements
摘要： A collisional radiative model for fast estimation and monitoring of atomic oxygen ground and excited state densities and ?uxes in varying Ar:O2 mixtures is developed and applied in double inductively coupled plasma source at a pressure of 5 Pa and incident power of 500 W. The model takes into account measured line intensities of 130.4 nm, 135.6 nm, 557.7 nm, and 777.5 nm, the electron densities and electron energy distribution functions determined using a Langmuir probe and multipole resonance probe as well as the state densities of the ?rst four excited states of argon measured with the branching fraction method and compared to tunable diode laser absorption spectroscopy. The in?uence of cascading and self absorption is included and the validity of the used cross sections and reaction rates is discussed in detail. The determined atomic oxygen state densities are discussed for their plausibility, sources of error, and compared to other measurements. Furthermore, the results of the model are analyzed to identify the application regimes of much simpler models, which could be used more easily for process control, e.g. actinometry.
关键词： absorption spectroscopy,atomic oxygen,probe measurements,collisional radiative model,optical emission spectroscopy
更新于2025-09-19 17:13:59
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Comparative study of electron temperature in cascaded arc Ar/N <sub/>2</sub> plasma using laser Thomson scattering combined optical emission spectroscopy approach
摘要： The expanding cascaded arc Ar/N2 plasma has been investigated by both the active and passive optical diagnostic technologies. In the investigation, the laser Thomson scattering (LTS) and optical emission spectroscopy (OES) have been adopted to measure electron temperature (Te) and electron excitation temperature (Texc), respectively. The LTS measurements show that a remarkable nonlinear behavior of Te as a function of the N2/(Ar + N2) ratio is found, which is caused by the collective interaction between the superelastic collision and the electron-impact excitation. The superelastic collisions by the highly excited vibrational nitrogen molecules can effectively heat the free electrons, while the electron kinetic energy can be transferred to N2 molecular internal energy via the electron impact with N2 in the ground state. The difference between Texc and Te demonstrates that the cascaded arc Ar/N2 plasma significantly deviates from the local thermodynamic equilibrium. This would be useful for improving our further understanding of nonequilibrium plasma and extending applications of the cascaded arc Ar/N2 plasma.
关键词： cascaded arc Ar/N2 plasma,local thermodynamic equilibrium,laser Thomson scattering,electron temperature,optical emission spectroscopy
更新于2025-09-19 17:13:59