Application of rubrene air-gap transistors as sensitive MEMS physical sensors

摘要： Micro electromechanical systems (MEMS) made of organic materials have attracted efforts on development a new generation of physical, chemical and biological sensors, for which the electromechanical sensitivity is the current major concern. Here, we present an organic MEMS made of a rubrene single crystal air-gap transistor. Applying mechanical pressure on the semiconductor results in high variations of drain current: an unparalleled Gauge factor above 4000 has been measured experimentally. Such a high sensitivity is induced by the modulation of charge injection at the interface between the gold electrode and the rubrene semiconductor as an unusual transducing effect. Applying these devices to the detection of acoustic pressure shows that force down to 230 nN can be measured with a resolution of 40 nN. This study demonstrates that MEMS based on rubrene air-gap transistors constitute a step forward to the development of high performance flexible sensors.