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Mass measurement of grasped object with tweezers employing bimorph piezoelectric actuators
摘要： This paper deals with tweezers for a mass detection during micromanipulation. It measures 52 mm×30 mm×10 mm and weighs 37 g. Each ?nger consists of a bimorph piezoelectric actuator with a stainless steel tip. One of the tweezers working as a vibrator was oscillated at its resonance frequency, and another working as a grasper opened and closed the gap between the tips of the bimorph piezoelectric actuators. The simulation model that represents the contact of two beams and a lumped mass as springs was described. The resonance frequency was increased when the tweezers grasped an object. The relationship between the mass of the object and frequency was obtained experimentally. Because the charge generated by the piezoelectric effect also affected the resonance frequency, the frequency change in the experiments was smaller than that in the simulation.
关键词： resonance frequency,mass evaluation,cantilever,Piezoelectric actuator,vibration
更新于2025-09-23 15:22:29
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Composite modeling and parameter identification of broad bandwidth hysteretic dynamics in piezoelectric fast steering platform
摘要： Over a broadband range of frequencies, it is difficult to develop precise model of piezoelectric fast steering platforms (FSPs) due to the complex hysteretic and dynamic behaviors. This paper thus presents one approach of composite modeling and parameter identification by employing a composite hysteretic model. The proposed composite model consists of the Bouc-Wen hysteresis, electro-mechanical dynamics, creep dynamics and the high frequency mirror dynamics. Physical meanings can be found in the linear component which is beneficial to controller design and other further developments using the proposed model. A step-by-step approach is proposed to identify the composite hysteretic model. Finally, the FSP experiment is provided to validate the effectiveness of the proposed modeling and parameter identification approaches.
关键词： Electro-optical system,Creep effect,Hysteretic dynamics,Fast steering platform,Electro-mechanical dynamics,Piezoelectric actuator
更新于2025-09-23 15:22:29
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Design of a novel dual-axis micro manipulator with an asymmetric compliant structure
摘要： This paper presents a novel piezoelectrically actuated dual-axis micro manipulator with an asymmetric compliant structure. The mechanical design of the micro manipulator is first presented. A novel guiding bridge (GB)-type mechanism was proposed and utilized in the left part of the micro manipulator to improve the dynamic performance of the micro manipulator. The analytical model has been established based on pseudo-rigid-body (PRB) model and matrix-based compliance modeling (MCM) method. The kinematic and the precision of the micro manipulator have been analyzed, and the input and output couplings have been investigated. The prototype of the micro manipulator has been fabricated by wire electro discharge machining (WEDM). Then, open-loop experimental tests have been performed. The experimental results match well with the analytical calculation, and the amplification ratios are 11.12 and 4.64 for left part and right part, respectively. Proportional-integral (PI) controller has been used to regulate the output displacement and grasping force, and a series of closed-loop experiments have been conducted to investigate the performance of the micro manipulator. The results show that the position resolution for both the right and left parts is 0.15 μm, and the force resolution is 4 mN.
关键词： Mechanical design,Piezoelectric actuator,Micro manipulator,Compliant mechanism
更新于2025-09-23 15:22:29
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Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning
摘要： This paper presents the design of a new compact one-degree-of-freedom (1-DOF) compliant stage driven by a piezoelectric actuator (PEA) for micro/nanopositioning in the vertical direction. An orthogonal compound bridge-type amplifier is introduced to amplify the displacement of the PEA. It significantly reduces the height of the stage and leads to a compact design. By analytical modeling of the mechanism, the design variables are determined, which are then optimized via the multiobjective genetic algorithm based on the finite-element analysis. Simulation results show that the 1-DOF stage is able to provide the maximum displacement of 181.18 μm in theory, which is more than 12 × the input displacement of PEA. Payload test results indicate that the stage can support a maximum load of about 80 N. Comparison study reveals that the presented vertical positioning stage offers a more compact structure than existing ones. A prototype is fabricated for experimental studies, and the deviation between the experimental and simulation results is discussed in detail. Moreover, closed-loop performance test exhibits a resolution of 10 nm for the developed vertical positioning stage.
关键词： flexure stage,piezoelectric actuator (PEA),micro/nanopositioning,Compliant mechanism,mechanism design
更新于2025-09-23 15:21:01
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An Easily Fabricated Linear Piezoelectric Actuator Using Sandwich Longitudinal Vibrators With Four Driving Feet
摘要： A piezoelectric actuator using three sandwich longitudinal vibrators is proposed and tested. The two horizontal vibrators are parallel to each other and orthogonal to the vertical vibrator. The ends of the two horizontal vibrators serve as the four driving feet. The actuator has a simple fabricating process, which will shorten the period of fabrication. Two modes of the actuator are used to get the elliptical trajectories on the driving feet. The frequencies of the two modes are tuned to be about 21.60 kHz with modal analysis by the finite element method (FEM). The operating principle is also examined with transient analysis by FEM. A prototype is fabricated and its vibration characteristics are verified by using a scanning laser Doppler vibrometer. The prototype shows the best mechanical performance with the optimum working frequency and phase difference of 18.50 kHz and 60°, respectively. The typical output of the prototype is a no-load speed of 439.41 mm/s, a maximum thrust of 40 N, and a maximum power of 5.01 W at the voltage of 200 VP?P. The mechanical characteristics of the prototype show that the exciting voltages can be used for the speed control due to the approximately linear relationship between them.
关键词： resonant state,vibration test.,Linear piezoelectric actuator,sandwich longitudinal vibrators
更新于2025-09-19 17:15:36
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A frequency-tunable nanomembrane mechanical oscillator with embedded quantum dots
摘要： Hybrid systems consisting of a quantum emitter coupled to a mechanical oscillator are receiving increasing attention for fundamental science and potential applications in quantum technologies. In contrast to most of the presented works in this field, in which the oscillator eigenfrequencies are irreversibly determined by the fabrication process, we present here a simple approach to obtain frequency-tunable mechanical resonators based on suspended nanomembranes. The method relies on a micromachined piezoelectric actuator, which we use both to drive resonant oscillations of a suspended Ga(Al)As membrane with embedded quantum dots and to fine-tune their mechanical eigenfrequencies. Specifically, we excite oscillations with frequencies of at least 60 MHz by applying an AC voltage to the actuator and tune the eigenfrequencies by at least 25 times their linewidth by continuously varying the elastic stress state in the membranes through a DC voltage. The light emitted by optically excited quantum dots is used as a sensitive local strain gauge to monitor the oscillation frequency and amplitude. We expect that our method has the potential to be applicable to other optomechanical systems based on dielectric and semiconductor membranes possibly operating in the quantum regime.
关键词： nanomembrane,piezoelectric actuator,frequency-tunable,quantum dots,mechanical oscillator
更新于2025-09-12 10:27:22
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[IEEE 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Munich, Germany (2019.6.23-2019.6.27)] 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Tunable All-Fiber Laser for Remote Sensing of Methane Near 3.4 μm
摘要： The mid-infrared (MIR) region of the optical spectrum has drawn considerable scientific interest in the past few years. Indeed, several molecules relevant to medical or environmental conundrums exhibit strong absorption lines in this region: for instance, methane lines in the MIR are up to 100 times stronger than in the near-infrared [1]. In turn, fiber lasers have long stood as prime candidates for remote gas detection in outdoor environments, given their exemplary robustness, power scaling and beam quality. However, while several previous contributions have targeted methane bands under 3.3 μm in wavelength [2], little work has been done to push fiber laser detection tools past 3.4 μm, where methane absorption lines are mostly decoupled from the absorption spectra of water and other atmospheric constituents. This is especially relevant when probing CH4 through a gas mixture with relatively high water content, such as when studying gas emission from methane-rich thermokarst lakes in northern regions. To this end, we present a tunable all-fiber laser emitting near 3.43 μm and operating at high average power. The laser design (Fig. 1) is based on an all-fiber dual-pumping scheme [3], which combines core-pumping at 1976 nm with clad-pumping at 976 nm in a single-mode erbium-doped fluoride glass fiber to reach, in the present case, up to 3 W of output power at the desired wavelength. The laser cavity itself is delimited by two fiber Bragg gratings (FBG): a highly-reflective (HR) FBG at the input, which has a narrow bandwidth to dictate the laser wavelength, and a lowly-reflective (LR) FBG at the output, which has a large bandwidth to accommodate shifts of the HR FBG. Tuning of the laser cavity is achieved by mechanically stretching (i.e. lengthening) the HR FBG via the beam bending technique [4]. The HR FBG is nested within an Invar-based metallic groove and fixed using a polymer of sufficient elasticity, the groove is then deformed using a piezoelectric actuator (PA), allowing for rapid and precise wavelength tuning over a wavelength range of a few nanometers. Figure 2 compares normalized spectra of the laser emission at various commanding voltages for the PA along with the absorption spectrum of methane as given by the HITRAN database [1]. As can be seen on Fig.2, the presence of consecutive extrema (min-max) allows for quick referencing of the measurement during each tuning cycle. Early gas cell experiments and further engineering refinement show good promise for future deployment in northern regions by climate scientists.
关键词： methane,remote sensing,mid-infrared,piezoelectric actuator,fiber Bragg gratings,tunable all-fiber laser
更新于2025-09-12 10:27:22
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Dynamic Hysteresis Based Modeling Of Piezoelectric Actuators
摘要： Piezoelectric actuators are popularly applied as actuators in high precision systems due to their small displacement resolution, fast response and simple construction. However, the hysteresis nonlinear behavior limits the dynamic modeling and tracking control of piezoelectric actuators. This paper studies a dynamic model of a moving stage driven by piezoelectric stack actuator. The Bouc-Wen model is introduced and analyzed to express the nonlinear hysteresis term. Two triangular actuating voltages with frequency of 1 Hz and amplitudes of 80 V and 90 V are applied to drive the piezoelectric stack actuator. The results demonstrate the existence of the hysteresis phenomenon between the input voltage and the output displacement of the piezoelectric stack actuator, and validate the correctness of the model.
关键词： Bouc-Wen model,hysteresis modeling,Piezoelectric actuator
更新于2025-09-11 14:15:04
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A Bouc–Wen Model-Based Compensation of the Frequency-Dependent Hysteresis of a Piezoelectric Actuator Exhibiting Odd Harmonic Oscillation
摘要： This paper proposes an enhancement of the Bouc–Wen hysteresis model to capture the frequency-dependent hysteretic behavior of a thin bimorph-type piezoelectric actuator which also exhibits odd harmonic oscillation (OHO) at specific input frequencies. The odd harmonic repetitive controller has recently been proposed to compensate for the hysteresis, and attenuates the OHO of the piezoelectric actuator for which the hysteresis nonlinearity is regarded as a disturbance. This paper proposes an alternate treatment of the hysteresis compensation with the attenuation of the OHO observed at some input frequencies. It will be shown that the proposed compensator fully utilizes the mathematical structure of the enhanced Bouc–Wen model proposed in this paper to compensate the hysteresis and to attenuate the OHO. The results of the hysteresis compensation experiment illustrate the excellent performance of the proposed control system, especially at the frequencies where OHO is conspicuous.
关键词： Bouc–Wen model,hysteresis compensation,hysteresis modeling,odd harmonic oscillation,piezoelectric actuator
更新于2025-09-11 14:15:04
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Modelling and Analysis of Characteristics of a Piezoelectric-Actuated Micro-/Nano Compliant Platform Using Bond Graph Approach
摘要： The piezoelectric-actuated ?exure-based compliant platform is commonly adopted in many ?elds of micro and nanotechnology. In this paper, bond graph modeling, and kinematic and dynamic characteristics of a piezoelectric-actuated micro-/nano compliant platform system are investigated. During modeling, the bond graph model of the piezoelectric actuator (PZT) is derived by considering both the electrical domain and the mechanical domain. Considering the compliances of ?exure hinges and elastic linkages, as well as the input ends, the bond graph model for the bridge-type displacement ampli?cation mechanism in the compliant platform is established by combining pseudo-rigid-body (PRB) model theory and elastic beam theory. Based on the interactions between the PZT subsystem and compliant platform subsystem, the kinematic performance of the proposed compliant platform system is evaluated through both computer simulations and experimental tests. Furthermore, the frequency responses, dynamic responses and load capacity of the compliant platform system are studied. This paper explores a new modeling method for a piezoelectric-actuated compliant platform system, which can provide an effective solution when analyzing the micro-/nano system.
关键词： piezoelectric actuator,micro-/nano compliant platform,bridge-type displacement ampli?cation mechanism,bond graph
更新于2025-09-09 09:28:46