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[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Self-Powered, High-Sensitive Human Cutaneous Activities Sensor
摘要： A self-powered piezoelectric sensor based on lead-free (K,Na)NbO3 (KNN) thin film for human health monitoring is presented. The sensor is fabricated on a flexible substrate and exhibits high sensitivity and stability. It can detect various physiological signals such as pulse, respiration, and body movement. The results demonstrate its potential for wearable health monitoring applications.
关键词： piezoelectric sensor,KNN thin film,health monitoring,lead-free,flexible substrate,wearable
更新于2025-09-23 15:22:29
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PZT/PZT and PZT/BiT Composite Piezo-Sensors in Aerospace SHM Applications: Photochemical Metal Organic + Infiltration Deposition and Characterization
摘要： The composition of fine-ground lead zirconate-titanate powder Pb(Zr0.52Ti0.48)O3, suspended in PZT and bismuth titanate (BiT) solutions, is deposited on the curved surface of IN718 and IN738 nickel-based super alloy substrates up to 100 μm thickness. Photochemical metal organic and infiltration techniques are implemented to produce smooth, semi-dense, and crack-free random orientated thick piezoelectric films as piezo-sensors, free of any dopants or thickening polymers. Every single layer of the deposited films is heated at 200 °C with 10 wt.% excess PbO, irradiated by ultraviolet lamp (365 nm, 6 watt) for 10 min, pyrolyzed at 400 °C, and subsequently annealed at 700 °C for one hour. This process is repeated successively until reaching the desired thickness. Au and Pt thin films are deposited as the bottom and top electrodes using evaporation and sputtering methods, respectively. PZT/PZT and PZT/BiT composite films are then characterized and compared to similar PZT and BiT thick films deposited on the similar substrates. The effect of the composition and deposition process is also investigated on the crystalline phase development and microstructure morphology as well as the dielectric, ferroelectric, and piezoelectric properties of piezo-films. The maximum remnant polarization of Pr = 22.37 ± 0.01, 30.01 ± 0.01 μC/cm2, the permittivity of εr = 298 ± 3, 566 ± 5, and piezoelectric charge coefficient of d33 = 126, 148 m/V were measured versus the minimum coercive field of Ec = 50, 20 kV/cm for the PZT/PZT and PZT/BiT thick films, respectively. The thick film piezo-sensors are developed to be potentially used at frequency bandwidth of 1–5 MHz for rotary structural health monitoring and also in other industrial or medical applications as a transceiver.
关键词： piezoelectric sensor,structural health monitoring,PZT/BiT,composite,characterization,sol-gel PMOD deposition,infiltration,aerospace structure,PZT/PZT,thick film
更新于2025-09-23 15:22:29
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[IEEE 2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP) - Hiroshima (2018.5.27-2018.6.1)] 2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP) - Piezoelectric Resonating Force Sensor in the Second Vibration Mode
摘要： A resonating force sensor is studied, which is composed of a metal bridge coated with a piezoelectric ?lm for force detection. It is thought to operate the sensor at the second ?exural vibration mode having one node at the center of the bridge. Resonance frequency and piezoelectric coupling are investigated in the frame of an analytical model, and compared with ?nite element analysis (FEA) in a desired force range. The resonance frequency-force relation derived from the analytical model is close the the FEA result in the force range. The coupling factor-force relation from the analytical model agrees with the one from FEA in the small force region, but it shows lower coupling than the FEA result in the large force region.
关键词： Resonance sensor,Electromechanical coupling,Piezoelectric sensor,Force sensor,Resonance frequency,Second mode
更新于2025-09-04 15:30:14