Surface acoustic wave-based ultraviolet photodetectors: a review

摘要： Over the past decade, ultraviolet (UV) detection has been a subject of major interest for both research scientists and engineers because of its important applications in both the civil and military fields. The rapid development of interdisciplinary research has enabled the realization of UV detectors based on a variety of principles. Among these devices, UV detectors based on surface acoustic wave (SAW) technology offer unique advantages of remote wireless operation capability and zero power consumption. This article provides a comprehensive review of the working principles, important parameters, and the acoustic wave and materials types used in SAW-based UV detectors. The research and development status of these detectors are discussed and the most commonly used methods to optimize device performance are also summarized. Novel types of acoustic UV detectors based on thin film bulk acoustic resonators (FBARs) and Lamb wave resonators (LMRs) are briefly introduced. Finally, future development challenges are proposed and suggestions for future directions are provided to aid the development of this important research field.