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[IEEE 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Munich, Germany (2019.6.23-2019.6.27)] 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Permanent Optimization of Large-FSR Dual-Microring Bandpass Filters
摘要： Energy-ef?cient communication links are crucial for future processors and optoelectronic microchips in order to continue growths in computing and information technologies [1]. Wavelength-division multiplexing (WDM) techniques based on silicon photonic circuits are ideal for high bandwidths data communication systems with small footprints [2,3]. Compact double ring resonators (DRRs) provide excellent properties to realize spectral ?lters with ?at-top transmission characteristics, providing a steep roll-off with low channel crosstalk at dense frequency grids. Hence, cascaded DRRs as illustrated in Fig. 1 (a) are well-suited for integrated WDM systems on optoelectronic microchips. The high refractive index of silicon facilitates small ring perimeters and the wide free spectral range (FSR ∝ 1 Lr ) enables multiplexing tens of data channels to a common bus waveguide. The high energy-ef?ciency which is enhanced by the strong thermo-optic effect (TOE) combined with the short physical lengths is another relevant advantage of the compact size. However, manufacturing variability and associated photonic component deviations remain a serious drawback [4]. Hence, most recent works use thermal heaters for the dynamic ?lter control as well as to counterbalance inevitable manufacturing deviations [5-7]. In this work, we present multilayer compatible 5 and 10μm radius DRR ?lters based on microrings manufactured with deposited amorphous silicon [8]. We demonstrate a permanent correction of manufacturing variations and optimize the spectral properties of DRR ?lters. Such fabrication imperfections which may arise more frequently in multilayer circuits are exempli?ed in Fig. 1 (a) where widths (Δw), heights (Δh), and refractive index (Δn) variations are implemented to one microring; even lowest deviations substantially degrade the ?lter response. A DRR measurement with undesired drop port splitting which was corrected through the SiO2 top cladding by 405 nm laser-trimming one of the rings is shown in Fig. 1 (b); the intermediate trimming spectra are provided in order to guide the eye. The possibility to permanently align ?lters to a given wavelength channel is presented in Fig. 1 (c). In this experiment both 5 μm radius racetracks were alternately trimmed to shorter wavelengths, without degrading the spectrum or the ?lter bandwidths. In summary, several compact DRR ?lters with multiplexers up to 8-channels suitable for multilayer integration at the CMOS back-end-of-line with start-of-art performance were successfully fabricated and tested. Malfunctioning components were identi?ed and optimized on micron-scales by a post-fabrication trimming method. The proposed correction method for DRR multiplexers allows adjusting ?lters to a prespeci?ed wavelength channel and enables more generalized concepts which do not require a thermal heater for each ring thereby mitigating detrimental thermal crosstalk and lowering the overall energy consumption.
关键词： manufacturing variability,Wavelength-division multiplexing (WDM),spectral ?lters,double ring resonators (DRRs),silicon photonic circuits,thermal heaters,Energy-ef?cient communication links,laser-trimming,amorphous silicon,CMOS back-end-of-line
更新于2025-09-16 10:30:52
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Hybrid External Cavity Laser with an Amorphous Silicon-Based Photonic Crystal Cavity Mirror
摘要： The authors present results on the performance of a hybrid external cavity photonic crystal laser-comprising semiconductor optical ampli?er, and a 2D photonic crystal cavity fabricated in low-temperature amorphous silicon. The authors demonstrate that lithographic control over amorphous silicon photonic crystal cavity-resonant wavelengths is possible, and that single-mode lasing at optical telecommunications wavelengths is possible on an amorphous silicon platform.
关键词： nanophotonics,silicon photonics,amorphous silicon,CMOS processing,photonic crystals,telecommunications,lasers
更新于2025-09-16 10:30:52
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<i>In situ</i> wavelength tuning of quantum-dot single-photon sources integrated on a CMOS-processed silicon waveguide
摘要： Silicon quantum photonics provides a promising pathway to realize large-scale quantum photonic integrated circuits (QPICs) by exploiting the power of complementary-metal-oxide-semiconductor (CMOS) technology. Toward scalable operation of such silicon-based QPICs, a straightforward approach is to integrate deterministic single-photon sources (SPSs). To this end, hybrid integration of deterministic solid-state SPSs, such as those based on InAs/GaAs quantum dots (QDs), is highly promising. However, the spectral and spatial randomness inherent in the QDs poses a serious challenge for scalable implementation of multiple identical SPSs on a silicon CMOS chip. To overcome this challenge, we have been investigating a hybrid integration technique called transfer printing, which is based on a pick-and-place operation and allows for the integration of the desired QD SPSs on any locations on the silicon CMOS chips at will. Nevertheless, even in this scenario, in situ fine tuning for perfect wavelength matching among the integrated QD SPSs will be required for interfering photons from dissimilar sources. Here, we demonstrate in situ wavelength tuning of QD SPSs integrated on a CMOS silicon chip. To thermally tune the emission wavelengths of the integrated QDs, we augmented the QD SPSs with optically driven heating pads. The integration of all the necessary elements was performed using transfer printing, which largely simplified the fabrication of the three-dimensional stack of micro/nanophotonic structures. We further demonstrate in situ wavelength matching between two dissimilar QD sources integrated on the same silicon chip. Our transfer-printing-based approach will open the possibility for realizing large-scale QPICs that leverage CMOS technology.
关键词： wavelength tuning,transfer printing,quantum photonics,single-photon sources,silicon CMOS,quantum dots
更新于2025-09-16 10:30:52