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Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces <i>via</i> Single-Pulse Laser Interference
摘要： High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovoltaics and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators with few hundred nanometers in diameter. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the pre-deposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication is a step towards a simple realization of spatially invariant metasurface-based devices.
关键词： direct laser interference patterning,metasurfaces,laser-matter interaction,dielectric nanostructures,silicon resonators,multi-beam interference
更新于2025-09-23 15:19:57
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Characterize and optimize the four-wave mixing in dual-interferometer coupled silicon microrings
摘要： By designing and fabricating a series of dual-interferometer coupled silicon microrings, the coupling condition of the pump, signal, and idler beams can be engineered independently and then we carried out both the continuous-wave and pulse pumped four-wave mixing experiments to verify the dependence of conversion ef?ciency on the coupling conditions of the four interacting beams, respectively. Under the continuous-wave pump, the four-wave mixing ef?ciency gets maximized when both the pump and signal/idler beams are closely operated at the critical coupling point, while for the pulse pump case, the ef?ciency can be enhanced greatly when the pump and converted idler beams are all overcoupled. These experiment results agree well with our theoretical calculations. Our design provides a platform for explicitly characterizing the four-wave mixing under different pumping conditions, and offers a method to optimize the four-wave mixing, which will facilitate the development of on-chip all-optical signal processing with a higher ef?ciency or reduced pump power.
关键词： silicon resonators,four-wave mixing,Mach–Zehnder interferometer
更新于2025-09-19 17:13:59