- 标题
- 摘要
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- 实验方案
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A 38 dBi Gain, Low-Loss, Flat Array Antenna for 320 GHz to 400 GHz Enabled by Silicon-On-Insulator Micromachining
摘要： Two high-gain ?at array antenna designs operating in the 320 – 400 GHz frequency range are reported in this paper. The two antennas show measured gains of 32.8 dBi and 38 dBi and consist of a 16 × 16 (256) element array and a 32 × 32 (1024) element array, respectively, which are fed by a corporate H-tree beamforming network. The measured operation bandwidth for both antennas is 80 GHz (22 % fractional bandwidth), and the total measured ef?ciency is above ?2.5 dB and above ?3.5 dB for the two designs in the whole bandwidth. The low measured loss and large bandwidth are enabled by optimizing the designs to the process requirements of the SOI micromachining technology used in this work. The total height of the antennas is 1.1 mm (1.2 λ at the center frequency), with sizes of 15 mm × 18 mm and 27 mm × 30 mm for both arrays. The antennas are designed to be directly mounted onto a standard WM-570 waveguide ?ange. The design, fabrication, and measurements of eight prototypes are discussed in this paper and the performance of the antennas compared to the simulated data, as well as manufacturability and fabrication repeatability are reported in detail.
关键词： terahertz radiation,corporate beamforming network,array antennas,silicon micromachining,silicon on insulator,waveguide arrays,submillimeter-wave antennas
更新于2025-09-23 15:19:57
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A Low-Profile and High-Gain Frequency Beam Steering sub-THz Antenna Enabled by Silicon Micromachining
摘要： A very low-profile sub-THz high-gain frequency beam steering antenna, enabled by silicon micromachining, is reported for the first time in this paper. The operation bandwidth of the antenna spans from 220 GHz to 300 GHz providing a simulated field of view of 56?. The design is based on a dielectric filled parallel-plate waveguide (PPW) leaky-wave antenna fed by a pillbox. The pillbox, a two-level PPW structure, has an integrated parabolic reflector to generate a planar wave front. The device is enabled by two extreme aspect ratio, 16 mm x 16 mm large perforated membranes, which are only 30 μm thick, that provide the coupling between the two PPWs and form the LWA. The micromachined low-loss PPW structure results in a measured average radiation efficiency of ?1 dB and a maximum gain of 28.5 dBi with an input reflection coefficient below ?10 dB. The overall frequency beam steering frontend is extremely compact (24 mm x 24 mm x 0.9 mm) and can be directly mounted on a standard WM-864 waveguide flange. The design and fabrication challenges of such high performance antenna in the sub-THz frequency range are described and the measurement results of two fabricated prototypes are reported and discussed.
关键词： beam steering,leaky-wave antennas,silicon on insulator,terahertz radiation,silicon micromachining,quasi-optics,submillimeter-wave antennas
更新于2025-09-11 14:15:04