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A Comparative Study of Gas Sensing Properties of Tungsten Oxide, Tin Oxide and Tin-Doped Tungsten Oxide Thin Films for Acetone Gas Detection
摘要： Nowadays, various metal oxide thin films have been used for the purpose of gas sensing. This research depicts a comparison of gas sensing properties among four different metal oxide thin films, namely, tungsten dioxide (WO2), tungsten trioxide (WO3), tin oxide (SnO2) and tin doped tungsten trioxide (Sn-doped WO3), for detecting acetone gas. Each metal oxide thin film was subjected to acetone gas flow of various concentrations and the corresponding changes in resistance were calculated. Characterizations such as x-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and gas sensing characterization for recording resistance changes have been performed. Each film was annealed at different temperatures for 1 h (WO2 and WO3 at 500°C, SnO2 at 300°C and Sn-doped WO3 at 400°C) so as to achieve an optimum grain size for sensing. The XRD patterns reveal formation of an orthorhombic phase of WO2, hexagonal phase of WO3 and orthorhombic phase of SnO2. AFM and SEM depict clear images of grain boundaries on the film. SnO2 has been found to be the best thin film for sensing acetone gas. Operational optimum temperature for sensing acetone gas has been calculated for each thin film (260°C for WO2, 220°C for WO3, 360°C for SnO2 and 300°C for Sn-doped WO3). It can detect a very low concentration of 1.5 ppm acetone gas with a good resistance response change of 30%. Various concentrations of acetone gas, namely, 1.5 ppm, 3 ppm, 5 ppm, 7 ppm, 10 ppm, 15 ppm and 20 ppm, have been detected using these metal oxide thin films, and thus the comparison has been made. The response time for SnO2 is approximately 3 min and recovery time is approximately 4 min.
关键词： tungsten oxide,acetone gas detection,topography,tin oxide,Metal oxide thin films,surface metrology,gas sensing,tin-doped tungsten oxide
更新于2025-09-23 15:23:52
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Laser Scanning Confocal Microscopy 3D Surface Metrology Applications
摘要： Surface metrology, measurement of solid surfaces topography, has become an important topic for many material scientists and engineers. Characterization of the surfaces can help researchers find new functional materials, improve device performance and so forth. ‘Seeing is believing.’ Visualization of fine 3-dimensional (3D) details of surfaces is critical in surface metrology studies. Among various observation and measurement techniques, Laser Scanning Confocal Microscopy (LSCM) becomes more and more popular due to the fact that it is non-contact and non-destructive to the samples, requires minimal sample preparation, and efficient automations and provides single nanometer level resolution. In this paper, we will introduce these features in detail, by using Olympus LEXT OLS5000, the newest 3D laser confocal scanning microscope.
关键词： Olympus LEXT OLS5000,3D Surface Metrology,Laser Scanning Confocal Microscopy
更新于2025-09-23 15:19:57