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Influence of Silicon Layers on the Growth of ITO and AZO in Silicon Heterojunction Solar Cells
摘要： In this article, we report on the properties of indium tin oxide (ITO) deposited on thin-film silicon layers designed for the application as carrier selective contacts for silicon heterojunction (SHJ) solar cells. We find that ITO deposited on hydrogenated nanocrystalline silicon (nc-Si:H) layers presents a significant drop on electron mobility μe in comparison to layers deposited on hydrogenated amorphous silicon films (a-Si:H). The nc-Si:H layers are not only found to exhibit a larger crystallinity than a-Si:H, but are also characterized by a considerably increased surface rms roughness. As we can see from transmission electron microscopy (TEM), this promotes the growth of smaller and fractured features in the initial stages of ITO growth. Furthermore, secondary ion mass spectrometry profiles show different penetration depths of hydrogen from the thin film silicon layers into the ITO, which might both influence ITO and device passivation properties. Comparing ITO to aluminum doped zinc oxide (AZO), we find that AZO can actually exhibit superior properties on nc-Si:H layers. We assess the impact of the modified ITO Rsh on the series resistance Rs of SHJ solar cells with >23% efficiency for optimized devices. This behavior should be considered when designing solar cells with amorphous or nanocrystalline layers as carrier selective contacts.
关键词： secondary ion mass spectrometry (SIMS),indium tin oxide (ITO),series resistance,Aluminum doped zinc oxide (AZO),transparent conductive oxide (TCO),transmission electron microscopy (TEM),silicon heterojunction (SHJ)
更新于2025-09-16 10:30:52
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Power Losses in the Front Transparent Conductive Oxide Layer of Silicon Heterojunction Solar Cells: Design Guide for Single-Junction and Four-Terminal Tandem Applications
摘要： In silicon heterojunction solar cells, optimization of the front transparent conductive oxide (TCO) layer is required in order to minimize both electrical and optical losses. In this article, design guidelines for this overall power loss minimization are presented—extending previous TCO optimization work that was limited to the maximization of the short-circuit current density alone—and these are used to prescribe the best TCOs for both single-junction and silicon-based four-terminal tandem applications. The employed procedure determines the loss associated with the front TCO layer as a function of the TCO carrier density, mobility, and thickness, as well as the pitch between the front electrode fingers. For a representative indium tin oxide (ITO) film with a mobility of approximately 20 cm2·V?1·s?1 and a carrier density of 2.5 × 1020 cm?3, the loss over the 700–1200 nm infrared wavelength range—the spectrum reaching the silicon bottom cell in a typical tandem structure—is minimized by using a finger pitch of 3 mm and an ITO thickness of 100–110 nm. This compares with an optimal finger pitch of 2 mm and an optimal ITO thickness of 70 nm for the same cell operating as a single-junction device under full spectrum. The methodology presented can also readily be applied to TCO materials other than ITO, to a wide variety of specific four-terminal tandem architectures and, with minor modifications, to rear TCO layers.
关键词： infrared (IR) spectrum,tandem solar cells,silicon heterojunction (SHJ) solar cells,transparent conductive oxide (TCO),Four-terminal
更新于2025-09-16 10:30:52