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Groove Formation in Glass Substrate by a UV Nanosecond Laser
摘要： This study reports the laser grooving of glass. In this study, an ultraviolet (UV) nanosecond laser is used to produce grooves in soda lime glass by varying laser power, scan speed, pulse repetition rate, and number of scans. The threshold power density to generate damage on glass surface is found to be ~6.37 × 108 W/cm2. According to the result of a single laser scan, at a high laser power and low scan speed, material removal does not nearly occur, and only volume melting underneath the glass surface and large thermal crack are induced. With the decreasing laser power and increasing scan speed, a groove with a smooth surface is formed owing to the melting-dominant material removal process. The groove of rough surface morphology is produced with the further increase of the scan speed due to shattering induced by shock wave. Under this condition, it is found that either small cracks are produced or a crack-free groove is obtained. In this study, the fabrication of the microchannel for bio-chip application is also attempted by multiple laser scans. The near rectangular-shaped and crack-free groove (width × depth: ~220 μm × ~500 μm) with quite a smooth surface is fabricated by the multiple laser scans with a non-zero scan spacing.
关键词： ultra violet (UV),laser grooving,nanosecond laser,glass,groove
更新于2025-09-19 17:13:59
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3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder
摘要： This paper demonstrates a 3D microlithography system where an array of 5 mm Ultra Violet-Light Emitting Diode (UV-LED) acts as a light source. The unit of the light source is a UV-LED, which comes with a length of about 8.9 mm and a diameter of 5 mm. The whole light source comprises 20 × 20 matrix of such 5 mm UV-LEDs giving a total number of 400 LEDs which makes it a very favorable source with a large area for having a batch production of the desired microstructures. This light source is able to give a level of precision in microfabrication which cannot be obtained using commercial 3D printers. The whole light source performs continuous rotational movement once it is turned on. This can also move up and down in a vertical direction. This multidirectional light source also comprises a multidirectional sample holder. The light source teaming up with the multidirectional sample holder highly facilitates the process of fabrication of a huge range of 3D structures. This article also describes the different levels of characterization of the system and demonstrates several fabricated 3D microstructures including high aspect ratio vertical micro towers, twisted turbine structures, triangles, inclined pillar ‘V’ structures, and hollow horn structures as well.
关键词： Ultra Violet (UV) lithography,high aspect ratio,SU8 microstructure,3D microstructure,tilt rotational sample holder
更新于2025-09-19 17:13:59