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Preparation and measurement of subwavelength bilayer metal wire grid polarizers on flexible plastic substrates
摘要： This paper presents a process for the fabrication of subwavelength bilayer metal wire grid polarizers and describes the performance characterization of polarizers that were produced using the proposed method. These polarizers have a period of 278 nm and were fabricated on flexible plastic substrates using nanoimprint lithography followed by an aluminum deposition process. Transmission efficiency in excess of 0.55 and an extinction ratio of more than 32 dB were achieved in the visible range when the aluminum layer thickness of the polarizer was 70 nm. When a polarization analyzer with a six-channel sensor prototype was tested, an average error of 0.2002? was obtained, with a maximum error of 1.105? and a standard deviation of 0.7255?. The proposed fabrication method will be suitable for many applications in optics, including the manufacture of compound eye structures.
关键词： Extinction ratio,TM transmission,Nanoimprint lithography,Bilayer metal wire-grid polarizers
更新于2025-09-23 15:23:52
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Self-Organized Conductive Gratings of Au Nanostripe Dimers Enable Tunable Plasmonic Activity
摘要： Plasmonic metasurfaces based on quasi-one-dimensional (1D) nanostripe arrays are homogeneously prepared over large-area substrates (cm2), exploiting a novel self-organized nanofabrication method. Glass templates are nanopatterned by ion beam-induced anisotropic nanoscale wrinkling, enabling the maskless con?nement of quasi-1D arrays of out-of-plane tilted gold nanostripes, behaving as transparent wire-grid polarizer nanoelectrodes. These templates enable the dichroic excitation of localized surface plasmon resonances, easily tunable over a broadband spectrum from the visible to the near- and mid-infrared, by tailoring the nanostripes’ shape and/or changing the illumination conditions. The controlled self-organized method allows the engineering of the nanoantennas’ morphology in the form of Au-SiO2-Au nanostripe dimers, which show hybridized plasmonic resonances with enhanced tunability. Under this condition, superior near-?eld ampli?cation is achievable for the excitation of the hybridized magnetic dipole mode, as pointed out by numerical simulations. The high e?ciency of these plasmonic nanoantennas, combined with the controlled tuning of the resonant response, opens a variety of applications for these cost-e?ective templates, ranging from biosensing and optical spectroscopies to high-resolution molecular imaging and nonlinear optics.
关键词： biosensing,plasmon hybridization,nanostripe dimers,self-organized nanoantennas,transparent nanoelectrodes,large-area metasurfaces,wire-grid polarizers
更新于2025-09-23 15:19:57
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Flexible devices fabricated by plate-to-roll nanoimprint lithography system
摘要： Plate-to-roll nanoimprint lithography (P2RNIL) system has been developed to realize high speed, large scale and high resolution nanoimprint process. Imprinted patterns with line width less than 75nm at a speed of 22cm2/s on flexible substrate has been achieved. To improve the quality of the patterns imprinted on, we proposed a compliant mechanism which can realize passive alignment and minimize the lateral displacement between the template and substrate. Finite element analysis of this compliant mechanism was carried out. By using the P2RNIL system, wire-grid polarizers(up to 10030:1 extinction ratio and up to 88% transmittance) and transparent metal electrodes whose performance is in good accordance with simulated results were successfully fabricated.
关键词： transparent metal electrodes,nanoimprint,wire-grid polarizers
更新于2025-09-09 09:28:46