Study on a high-temperature optical fiber F–P acceleration sensing system based on MEMS

摘要： Vibration measurement at high temperature is of great signi?cance to monitoring the operation of major projects and mechanical equipment. As the temperature resistance of electrical vibration sensors is usually below 600 °C, it cannot meet the requirements of some high-temperature measuring conditions. This paper studies a high-temperature Fabry–Perot (F–P) acceleration sensing system with general single-mode ?ber. A high-temperature sensitive diaphragm is machined based on micro-electromechanical system (MEMS) technology and it is combined with the ?ber microstructure to enable the sensing probe to be packaged under high temperatures. According to the temperature characteristic of the length of the F–P cavity, a signal demodulation system was proposed based on the rapid automatic tracking of the quiescent operation point. The complete optical ?ber F–P acceleration sensing system conducted real-time vibration detection of high temperature casting in the foundry factory. The experimental result indicates that the optical ?ber high-temperature acceleration sensor showed a better vibration response in the working frequency of 100–1000 Hz and the relative error of the frequency measurement is less than 1.56% under normal temperatures and a high temperature of 800 °C.