研究目的
Investigating the design and performance of a high-temperature optical fiber F–P acceleration sensing system based on MEMS technology for vibration measurement in extreme environments.
研究成果
The MEMS optical fiber F–P acceleration sensing system demonstrated better vibration frequency response and higher measuring precision in the working frequency range of 100–1000 Hz, with a relative error of frequency measurement below 1.56% at temperatures up to 800 °C. The system overcomes the limitations of FBG sensors at high temperatures and uses ordinary single-mode optical fiber instead of sapphire fiber.
研究不足
The study's limitations include the sensor's performance being tested up to 800 °C, and potential errors due to high temperature effects on the MEMS sensitive chip's elastic coefficient, affecting resonant frequency.
1：Experimental Design and Method Selection:
The study involved designing a high-temperature Fabry–Perot (F–P) acceleration sensing system using MEMS technology for the sensitive diaphragm and a general single-mode fiber. The signal demodulation system was based on the rapid automatic tracking of the quiescent operation point.
2：Sample Selection and Data Sources:
The sensor probe was tested under normal atmospheric temperature and high temperatures (600 °C, 700 °C, and 800 °C) to analyze frequency measurement error, amplitude frequency characteristics, and the relationship between acceleration and vibration frequency.
3：List of Experimental Equipment and Materials:
Equipment included a high temperature furnace, vibration test platform, power amplifier, pulse control system, signal demodulation module, and data processing unit. Materials involved a MEMS silicon carbide sensitive diaphragm and ordinary single-mode optical fiber.
4：Experimental Procedures and Operational Workflow:
The sensor probe was installed on a vibration test platform, and tests were conducted at varying frequencies and temperatures. The system's performance was evaluated based on vibration response and measurement accuracy.
5：Data Analysis Methods:
The signal strength was continuously collected, and the average value was used to adjust the working wavelength of the tunable laser source to ensure linear operation. Fast Fourier Transform (FFT) was used to obtain frequency domain signals.
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