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Comparison of quantitative analyses using SIMS, atom probe tomography, and femtosecond laser ablation inductively coupled plasma mass spectrometry with Si <sub/>1a??X</sub> Ge <sub/>X</sub> and Fe <sub/>1a??X</sub> Ni <sub/>X</sub> binary alloys
摘要： Due to their electrical and physical properties, Si1?XGeX materials are widely used in microelectronic devices. In particular, the Ge component found within Si1?XGeX compounds is important for enhancing carrier mobility and altering the lattice constant of metal-oxide-semiconductor field-effect transistors. In this study, magnetic sector secondary ion mass spectrometry (magnetic sector SIMS) and time-of-flight secondary ion mass spectrometry (ToF-SIMS) were used to determine the accurate concentrations of major compositions present within binary alloy samples. However, quantitative SIMS analysis is limited by the matrix effect, which influences the sputter yield of an element in a compound and alters the secondary ionization yields. Quantitative deviations that were due to the matrix effect were reduced by using Cs cluster ions (MCs+ and MCs2+) instead of elemental ions; the SIMS results using the elements were, therefore, compared with those using MCs+ and MCs2+ cluster ions. In the case of Fe1?XNiX alloys that have a less matrix effect compared to Si1?XGeX alloys, both the Cs primary ion beam (Cs+) and an oxygen primary ion beam (O2+) were used to measure the Fe1?XNiX compositions. The quantitative results from the two different primary ion beams were then compared to understand the ionization process. Deviations in the quantitative values gained with the O2+ beam were lower than those obtained using the Cs+ primary ions, meaning that using oxygen as the primary ion improves the accuracy in quantifying Fe1?XNiX compounds. Other reliable tools for analysis such as atom probe tomography and femtosecond laser ablation inductively coupled plasma mass spectrometry were also used in the quantitative analysis, with results that were consistent with the most accurate results obtained using magnetic sector SIMS and ToF-SIMS.
关键词： Si1?XGeX,femtosecond laser ablation inductively coupled plasma mass spectrometry,atom probe tomography,SIMS,Fe1?XNiX,binary alloys
更新于2025-09-23 15:21:01
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Engineering of high quality factor THz metasurfaces by femtosecond laser ablation
摘要： We report on the realization of high Q metasurfaces operating in the THz frequency range by femtosecond laser ablation applied to a nanometric metallic layer over a silicon substrate. Two different fabrication methods are used to develop periodic patterns whose basic elements are in form of an array of through-holes or metallic islands. The response of the resulting structures is characterized using a time-domain spectrometer in the frequency range 0.3–1.5 THz. The experimental findings are compared with the predictions of full wave electromagnetic simulations. The fairly good agreement between simulation predictions and experimental findings evidences that the proposed approach can offer a facile way to the elaboration of THz metasurfaces.
关键词： Femtosecond laser ablation,THz,High quality factor,Metasurfaces
更新于2025-09-23 15:21:01
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Morphological characteristics of nanoholes induced by single-shot femtosecond laser ablation of borates and aluminate silicates
摘要： Single-shot femtosecond laser ablation experiments with linearly and circularly polarized light were conducted in order to investigate the morphological characteristics of surface nanostructures in lithium borate crystals and glasses, a strontium borate crystal, lanthanide containing borate crystals, and aluminate silicate crystals: Li2B4O7 (LTB) and LiB3O5 (LBO) crystals and Li2O?2B2O3 (LTB) and Li2O?3B2O3 (LBO) glasses; SrB4O7 (SBO) crystal; Li6Gd(BO3)3 (LGB) and LaSc3(BO3)4 (LSB) crystals; and Ca2Al2SiO7 (CAS) and CaSrAl2SiO7 (CSAS) crystals. In the present study, the material and laser polarization dependance of the morphology of nanoholes was examined in these crystals and glasses. A single nanohole or two holes (a primary hole and a secondary hole) were observed in the borate and aluminate silicate crystals. The size of the nanohole is not restricted by the diffraction limit but instead is dependent on the laser fluence and the materials. It is suggested that the formation of these secondary nanoholes in the studied crystals is attributed to a spontaneous reshaping of the incoming Gaussian pulse into a Gaussian–Bessel pulse. In the LTB and LBO crystals, nanoholes (both primary and secondary holes) with subwavelength sides exhibit a quadrilateral (approximately square or rectangular) morphology, regardless of linear or circular polarization. The sides of the quadrilateral nanoholes lie approximately in the {h h 0} planes on the LTB crystal and in the ({h 0 0} and {0 0 l}) planes on the LBO crystal. We found that the nanohole morphology did not reflect the spatial distribution of the laser intensity. These phenomena were the first observations on the anisotropic morphology of nanoholes. These morphologies do not correspond to the circular symmetric pattern of the Gaussian intensity distribution of the incoming laser beam. This is contrary to the expectations based on the generally accepted laser ablation mechanism. The quadrilateral nanoholes could be an inherent morphology in the LTB and LBO crystals. The morphology of the network structure in their quadrilateral holes in the LTB and LBO crystals is considered to reflect the continuous BO3 and/or BO4 3? 5? respective tetragonal or orthorhombic unit cells, in which self-tapped excitons are formed in an initial process under multiphoton excitation. In contrast, the SBO, LGB, LSB, CAS, and CSAS crystals and the LTB and LBO glasses exhibit circular nanoholes with subwavelength diameters independent of the laser polarization, the structure, or the composition. The isotropic morphology of nanoholes in these samples reflects the circular pattern of the Gaussian intensity profile of the focused laser beam.
关键词： borate,single pulse,aluminosilicate,scanning electron microscopy,crystal structure,nanohole morphology,femtosecond laser ablation,nanostructuring
更新于2025-09-23 15:19:57
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Femtosecond Laser Ablation for Mesoscale Specimen Evaluation
摘要： Focused ion beam machining revolutionized the way samples are studied in materials science. The introduction of this tool enabled researchers to break into new frontiers of research. While this method focused on the nanometer length scale, the mesoscale manufacturing of samples has not seen such advances. It remains a challenge to manufacture sample geometries too large for focused ion beam milling yet too small for conventional machining. Femtosecond laser ablation opens this length scale of sample space and allows the fabrication of numerous useful geometries. This paper outlines a state-of-the-art femtosecond laser machining system that can be used for rapid, micro- and mesoscale sample preparation. To illustrate the utility of this system, stress–strain data are presented for single-crystal Cu micropillars and three microscale tensile test specimens prepared from physical-vapor-deposited Cu and Ni foils.
关键词： Femtosecond laser ablation,mesoscale specimen,microstructure examination,mechanical testing
更新于2025-09-19 17:13:59
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Numerical Investigation of Ultrashort Laser-Ablative Synthesis of Metal Nanoparticles in Liquids Using the Atomistic-Continuum Model
摘要： We present a framework based on the atomistic continuum model, combining the Molecular Dynamics (MD) and Two Temperature Model (TTM) approaches, to characterize the growth of metal nanoparticles (NPs) under ultrashort laser ablation from a solid target in water ambient. The model is capable of addressing the kinetics of fast non-equilibrium laser-induced phase transition processes at atomic resolution, while in continuum it accounts for the effect of free carriers, playing a determinant role during short laser pulse interaction processes with metals. The results of our simulations clarify possible mechanisms, which can be responsible for the observed experimental data, including the presence of two populations of NPs, having a small (5–15 nm) and larger (tens of nm) mean size. The formed NPs are of importance for a variety of applications in energy, catalysis and healthcare.
关键词： metal nanoparticles,femtosecond laser ablation,dual nanoparticle distribution,pulsed laser ablation in liquids
更新于2025-09-16 10:30:52
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Laser-Ablative Synthesis of Isotope-Enriched Samarium Oxide Nanoparticles for Nuclear Nanomedicine
摘要： Nuclear nanomedicine is an emerging field, which utilizes nanoformulations of nuclear agents to increase their local concentration at targeted sites for a more effective nuclear therapy at a considerably reduced radiation dosage. This field needs the development of methods for controlled fabrication of nuclear agents carrying nanoparticles with low polydispersity and with high colloidal stability in aqueous dispersions. In this paper, we apply methods of femtosecond (fs) laser ablation in deionized water to fabricate stable aqueous dispersion of 152Sm-enriched samarium oxide nanoparticles (NPs), which can capture neutrons to become 153Sm beta-emitters for nuclear therapy. We show that direct ablation of a 152Sm-enriched samarium oxide target leads to widely size- and shape-dispersed populations of NPs with low colloidal stability. However, by applying a second fs laser fragmentation step to the dispersion of initially formed colloids, we achieve full homogenization of NPs size characteristics, while keeping the same composition. We also demonstrate the possibility for wide-range tuning of the mean size of Sm-based NPs by varying laser energy during the ablation or fragmentation step. The final product presents dispersed solutions of samarium oxide NPs with relatively narrow size distribution, having spherical shape, a controlled mean size between 7 and 70 nm and high colloidal stability. The formed NPs can also be of importance for catalytic and biomedical applications.
关键词： nuclear nanomedicine,samarium (Sm) oxide nanoparticles,pulsed laser ablation in liquids,femtosecond laser ablation and fragmentation
更新于2025-09-16 10:30:52
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Phenomenological studies of femtosecond laser ablation on optical thin films for integrated photonics
摘要： In this work, we present a well-supported procedure to fabricate ridge optical waveguides onto thin films of PLZT by femtosecond laser ablation. To achieve smooth-guiding structures that guarantee good optical performance we have studied the characteristics of ablation threshold for different kinematic conditions of fs laser machining and we have also explored the different ablation regimens for several fluences reached. Furthermore, we characterized the morphology and roughness of ridge waveguides through a modal analysis of scattering loss for waveguides conducted by single and multiple scans. An innovative phenomenological model that describes the sidewall roughness to process parameters is proposed in this paper. With this approach, it is possible to extend the manufacturing method of smooth-guiding structures to many optical thin films by fs micromachining, so as to create integrated photonics devices that can be addressed to different technological applications.
关键词： Thin films,Integrated photonics,Laser materials processing,Optical waveguides,Femtosecond laser ablation
更新于2025-09-16 10:30:52
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Experimental Investigation on the Spatial-temporal Evolution of the hole formation during Laser Helical Drilling
摘要： In order to study the influence of process parameters of femtosecond laser helical machining on the formation of micro-holes, we selected main parameters of the femtosecond laser helical drilling process, used 304 stainless steel as the target material, designed a 5-factor and 5-level orthogonal experiment based on the orthogonal table, and analyzed the significance levels of the impacts of single pulse energy, repetition rate, rotation rate, rate of focus downward movement, and air-blowing pressure on the ablation depth. Based on back propagation (BP) neural network, we established the relationship model between five factors and the material ablation depth, and trained the network with orthogonal experiment data. We used the data of the additional drilling experiments to test the generalization ability of the established network, and the results show that the prediction error of the model is within 3%. We designed a single-factor experiment for the characteristic parameter of the helical drilling--the rate of focus downward movement--and obtained the effect of the rate of focus downward movement on the formation of the micro-holes during the process of femtosecond laser helical drilling.
关键词： femtosecond laser,ablation depth,helical drilling,micro-holes,BP neural network
更新于2025-09-16 10:30:52
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Prediction of femtosecond laser ablation parameter on Human teeth using chemical compositional analysis
摘要： Laser-based tooth preparation is an emerging non-invasive technique in dentistry. The knowledge about laser ablation parameters is essential for precise removal of lesion or damaged part of the tooth. The present study introduced a novel technique to determine key laser ablation parameters using elemental analysis so that the clinician can readily obtain the optimized laser processing condition. In pursuance of correlating ablation parameters with elemental composition of teeth, a large elemental variation is induced on the dentin and enamel surface by pretreatment using orthophosphoric acid and Carie care gel. The pretreated enamel and dentin surface were irradiated by 800 nm, 100 fs, Ti:Sapphire laser and the elemental analysis were carried out by EDS. Threshold fluence shows the negative correlation with carbon element (C) and shows a positive correlation with Ca and P whereas the converse is true for effective Gaussian beam radius and effective energy penetration depth. The Ca, P and C show good linearity with all ablation parameters. Despite high sensitivity of C, both Ca and P can be the most reliable probe to predict the laser ablation parameters. The method present a simple and straightforward tool to optimize the laser parameter from the non-destructive evaluation of chemical composition even in case of tooth complexity (age, sex and race). In essence, the chemical composition analysis by a suitable probe will improve the precision of laser surgery and reduce the tissue damage in clinical use.
关键词： dentin,Femtosecond laser ablation,enamel,teeth compositional analysis,ablation parameters
更新于2025-09-12 10:27:22
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Carbon multicharged ions emission from femtosecond laser plume
摘要： Carbon ion emission from femtosecond laser ablation of a glassy carbon target is studied. A Ti:sapphire laser (pulse duration τ ~ 150 fs, wavelength λ = 800 nm, laser fluence F ≤ 6.4 J cm?2) is used to ablate the carbon target while ion emission is detected by a time-of-flight detector equipped with a three-grid retarding field analyzer. A strong effect of the laser pulse fluence on the yield of carbon ions is observed. Up to C6+ ions are detected. The carbon ion time-of-flight signal is fit to a shifted Maxwell-Boltzmann distribution and used to extrapolate the effective plasma ion temperature Tieff = 6.9 eV. Applying an external electric field along the plasma expansion direction increases ion extraction, possibly due to the retrograde motion of the plasma-vacuum edge.
关键词： Femtosecond laser ablation,Time-of-flight,Plasma ion temperature,Carbon multicharged ions,Shifted Maxwell-Boltzmann distribution
更新于2025-09-12 10:27:22