Tailoring metal film texture by use of high atomic mobility at metal-semiconductor interfaces

摘要： The difference in the microstructural and texture evolution of Al films grown on amorphous SiO2 (a-SiO2) and amorphous Ge (a-Ge) substrates have been investigated. Surprisingly, the a-Ge substrate was found to change the preferred orientation of Al grains from the conventional (1 1 1) to the unconventional (1 1 0). The effect of the high mobility of Ge atoms at the metal-semiconductor interface on the microstructural and texture evolution of the metal thin film was studied. The diffusion of the Al adatoms on the a-Ge substrate was suppressed owing to the segregation of Ge atoms at the film surface. The mobility of Al grain boundaries was also suppressed because of grain-boundary wetting by the Ge atoms. It is concluded that the a-Ge substrate could tailor the Al grain orientation from (1 1 1) to (1 1 0) owing to the change in the film-growth mode from three-dimensional to two-dimensional nucleation. The concept of interaction-induced island-growth model, which is based on the Volmer–Weber growth model, is also discussed here. This work thus demonstrates how the atomic mobility at the interface of the metal thin film and the semiconductor substrate controls the film microstructure and texture during deposition.