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oe1(光电查) - 科学论文

2 条数据
?? 中文（中国） ▾

  • Repulsive magnetic field–assisted laser-induced plasma micromachining for high-quality microfabrication

    摘要： Surface micro-/nanostructures are widely used in the fabrication of various functional microsystems. Laser-induced plasma micromachining can greatly improve surface quality in terms of recast layers and thermal defects compared with laser direct writing. Magnetic field has the ability to constrain plasma diffusion and can ensure the stability of laser-induced plasma processing. This paper compares the effects of laser direct–writing processing and laser-induced plasma processing of single-crystal silicon at the micro-/nanoscale, and emphatically analyzes the material removal mechanism of repulsive magnetic field–assisted laser-induced plasma micromachining. It is shown that the volume of the laser-induced plasma was constrained under the influence of Lorentz force, a high-quality smooth microgroove without thermal defects was obtained, and its line width was reduced by 30%.

    关键词： Laser-induced plasma micromachining,Magnetic confinement,Thermal defects,Micro-/nanofabrication

    更新于2025-11-21 11:24:58

  • Experimental investigation and optimization of laser induced plasma micromachining using flowing water

    摘要： In this study, laser induced plasma micromachining using flowing water (F-LIPMM) was performed to create micro-channels on stainless steel surface. The effects of process parameters (water speed, laser pulse energy, frequency and scanning speed) on the responses of micro-channel width, depth, material removal rate (MRR) and heat affected zone (HAZ) were investigated based on response surface methodology (RSM). The regression models for the machined width, depth, MRR and HAZ were developed, and the adequacies of the developed models were subsequently verified by analysis of variance (ANOVA) method. Finally, grid structures consisting of desired micro-channels were created with the optimum process parameters: water speed of 8 m/s, pulse energy of 10.4 μJ, frequency of 15.8 kHz and scanning speed of 2.7 mm/s. The uniform micro-channels with smooth bottoms, side-walls and small HAZ were obtained, and the results showed that the predicted responses using the developed models were comparable with the experimental results.

    关键词： Laser induced plasma micromachining,RSM,Micro-channels,Flowing water

    更新于2025-09-16 10:30:52