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[ASME ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Quebec City, Quebec, Canada (Sunday 26 August 2018)] Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems - Complex Logic Operations Based on MEMS Resonators
摘要： Complex logic functions based on micro electromechanical resonators has significant attention. Realization of complex logic functions through cascading micro resonators has been deterred by challenges involved in their interconnections and the large required array of resonators. This paper presents a micro electromechanical system MEMS resonator with multiple input (actuation) and output (detection) that enables the realization of complex logic operations. The devices are based on a compound resonator consisting of an in- plane clamped-guided arch beam that is mechanically coupled from its guided side to two flexure beams and to another T- shaped resonant beam. As examples, we experimentally demonstrate using the device to realize a half adder and a 1:2 DEMUX, based on electrothermal and electrostatic tuning of the arch beam and side resonant beam. The logic operation is frequency modulation. This paper demonstrates that with such compound MEMS resonators, it is possible to build more complex logic functionalities.
关键词： Multi-input and multi-output,half adder,DEMUX,electrostatic and electrothermal actuation,MEMS resonators
更新于2025-09-23 15:21:01
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Interface Stress for Bidirectional Frequency Tuning of Prebuckled Vanadium Dioxide MEMS Resonators
摘要： Interface stress between structural materials and thin film coatings has a significant influence on the resonant frequency of microelectromechanical system (MEMS) resonators. In this work, the axial stress on different types of buckled bridge MEMS resonator structures is controlled through the solid-to-solid phase transition of a VO2 thin film coating. The devices have identical dimensions, but different buckling orientations and profiles due to the combined effect of overetching and residual thermal stress mismatch. Thermal actuation is used to tune the resonant frequency of the device, but the changes in frequency are found to be dependent on the type of buckling for the device. Thermal actuation is achieved by applying an electrical current to integrated heaters, or by uniform substrate heating. Bidirectional tunability is found when substrate heating is used, while Joule heating shows a monotonic change in frequency. This phenomenon can be attributed to the transition in boundary conditions, where the turning points are indicated by the prominent changes in buckling amplitude. In addition, devices with opposite buckling orientations exhibit different tuning behaviors which can be explained by different bending moments induced by beam stress interface modification.
关键词： MEMS resonators,interface stress,buckling,vanadium dioxide,resonant frequency tuning
更新于2025-09-19 17:13:59