研究目的
To demonstrate an alternative approach to realize complex logic circuits, such as a half adder and a 1:2 DEMUX, from a single MEMS microstructure.
研究成果
The paper demonstrated that with compound MEMS resonators, it is possible to build more complex logic functionalities. The experimental results showed that the resonance frequencies of the arch microbeam and the side beam with electrothermal actuation can be very useful and helpful for selecting the frequency of operations for the two logic gates.
研究不足
The challenges involved in the interconnections and the large required array of resonators for realizing complex logic functions through cascading micro resonators.
1：Experimental Design and Method Selection:
The design relies on in-plane arch clamped-guided microbeam attached to another resonant beam from the side, in which the two beams are excited electrostatically. Additionally, the design is provided with two electrothermally actuated flexures beams that are used for tuning the resonance frequencies of the beams.
2：Sample Selection and Data Sources:
The structure is fabricated from a highly conductive silicon device layer of silicon-on-insulator (SOI) wafer from MEMSCAP.
3：List of Experimental Equipment and Materials:
Network Analyzer (E5071C), low noise amplifiers (LNA), DC sources, and the MEMS resonator device.
4：Experimental Procedures and Operational Workflow:
The resonance frequencies of the beams are measured under various electrothermal and electrostatic actuations. The logic operations are demonstrated by switching between LOW and HIGH states of the S21 transmission signal corresponding to the logic outputs '0' and '1'.
5：1'. Data Analysis Methods:
5. Data Analysis Methods: The S21 transmissions for the beams are measured to determine the logic outputs.
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