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[IEEE 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Shanghai (2018.8.8-2018.8.11)] 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Polymorphic impedance matching technique for MEMS phase shifter
摘要： The amplitude and phase consistency control level is an important factor affecting the performance of phased array antenna. MEMS phase shifter has important application potential in phased array antenna, but the current MEMS phase shifter device has poor amplitude and phase consistency, making it difficult to integrate directly in phased array antenna system. In this paper, a novel multi-states matching technology for MEMS phase shifter is proposed to overcome the above-mentioned difficulty. To control amplitude fluctuation and phase shift error of phase shifter in the using process, we proposed a general network design method focusing on the given polymorphic S parameter matrix of MEMS phase shifter based on the theory of microwave network. The key of the method is as following: with the help of the mature microwave network synthesis method and the particle swarm optimization algorithm combined by matching circuit parameter optimization, obtain actual S parameter matrixes of two polymorphic matching networks for the corresponding MEMS phase shifter, so as to enhance the amplitude and phase consistency integrated application. The simulation results verify the feasibility of the method, and so that we form a technical way to improve the consistency of amplitude and phase of MEMS phase shifter system through polymorphic matching network, which has important theoretical and practical value.
关键词： multi-states,MEMS phase shifter,matching technology
更新于2025-09-23 15:23:52
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[Institution of Engineering and Technology 12th European Conference on Antennas and Propagation (EuCAP 2018) - London, UK (9-13 April 2018)] 12th European Conference on Antennas and Propagation (EuCAP 2018) - W-Band True-Time Delay Phase Shifters Using Paraffin Microactuators
摘要： We report a distributed loaded line phase shifter based on a new class of electro-thermally actuated RF MEMS devices using paraf?n phase-change material (PCM). Paraf?n is a low loss (tan δ = 6.6×10?4) mechanical phase-change material that exhibits a 15% volumetric change through its solid-liquid transition. Due to its unique electrical and mechanical properties, paraf?n PCM variable capacitors exhibit a very low loss which is critical in designing recon?gurable structures. Here, a low-loss paraf?n PCM based true-time delay, continuously-tunable phase shifter is designed and optimized. A ?gure-of merit of 71.8?/dB is achieved while maintaining a return loss more than 12 dB. Designed phase shifter has a maximum insertion loss of 5 dB for a 360? phase shift. Electro-thermo-mechanical performance of the paraf?n PCM device is studied by carrying out a fully coupled multiphysics simulation. Maximum displacement of 0.8 μm is achieved with a 2.6 μm-thick paraf?n ?lm. A new fabrication method for the deposition of the thin paraf?n ?lm is developed and a fabrication process for the device is presented.
关键词： MEMS,phase shifter,phase-change material,DMTL,paraf?n,millimeter wave
更新于2025-09-04 15:30:14