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[IEEE 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Shanghai (2018.8.8-2018.8.11)] 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Polymorphic impedance matching technique for MEMS phase shifter

DOI:10.1109/ICEPT.2018.8480518 出版年份:2018 更新时间:2025-09-23 15:23:52
摘要: The amplitude and phase consistency control level is an important factor affecting the performance of phased array antenna. MEMS phase shifter has important application potential in phased array antenna, but the current MEMS phase shifter device has poor amplitude and phase consistency, making it difficult to integrate directly in phased array antenna system. In this paper, a novel multi-states matching technology for MEMS phase shifter is proposed to overcome the above-mentioned difficulty. To control amplitude fluctuation and phase shift error of phase shifter in the using process, we proposed a general network design method focusing on the given polymorphic S parameter matrix of MEMS phase shifter based on the theory of microwave network. The key of the method is as following: with the help of the mature microwave network synthesis method and the particle swarm optimization algorithm combined by matching circuit parameter optimization, obtain actual S parameter matrixes of two polymorphic matching networks for the corresponding MEMS phase shifter, so as to enhance the amplitude and phase consistency integrated application. The simulation results verify the feasibility of the method, and so that we form a technical way to improve the consistency of amplitude and phase of MEMS phase shifter system through polymorphic matching network, which has important theoretical and practical value.
作者: Shumin Zhao,Hao Chi Zhang,Jiahao Zhao
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To overcome the poor amplitude and phase consistency of MEMS phase shifters, which makes them difficult to integrate into phased array antenna systems, by proposing a novel multi-states matching technology.

The proposed polymorphic impedance matching technique significantly improves the amplitude and phase consistency of MEMS phase shifters, reducing amplitude fluctuation range from -1.3776 dB to 1.0714 dB to -0.4998749 dB to 0.4940076 dB and phase shift error range from -6.685° to 8.4455° to -3.949° to 2.5128°. This method provides a general approach for enhancing the performance of polymorphic microwave devices in integrated systems, with potential applications beyond MEMS phase shifters.

The study is based on simulation results for a 2-bit MEMS phase shifter; experimental validation with physical devices is not covered. The method may require adjustments for higher-bit phase shifters or other polymorphic devices, and the PSO algorithm's efficiency and convergence could be affected by problem complexity.

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