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Measurement of Optical Constants of TiN and TiN/Ti/TiN Multilayer Films for Microwave Kinetic Inductance Photon-Number-Resolving Detectors
摘要： We deposit thin titanium nitride (TiN) and TiN/Ti/TiN multilayer ?lms on sapphire substrates and measure the re?ectance and transmittance in the wavelength range from 400 to 2000 nm using a spectrophotometer. The optical constants (complex refractive indices), including the refractive index n and the extinction coef?cient k, have been derived. With the extracted refractive indices, we propose an optical stack structure using low-loss amorphous Si (a-Si) anti-re?ective coating and a backside aluminum (Al) re?ecting mirror, which can in theory achieve 100% photon absorption at 1550 nm. The proposed optical design shows great promise in enhancing the optical ef?ciency of TiN-based microwave kinetic inductance photon-number-resolving detectors.
关键词： TiN,Optical constants,Microwave kinetic inductance detectors,Refractive index
更新于2025-11-14 15:25:21
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Development of Thermal Kinetic Inductance Detectors Suitable for X-ray Spectroscopy
摘要： We report on the development of thermal kinetic inductance detectors (TKIDs) suitable to perform X-ray spectroscopy measurements. The aim is to implement MKIDs sensors working in thermal quasi-equilibrium mode to detect X-ray photons as pure calorimeters. The thermal mode is a variation on the MKID classical way of operation that has generated interest in recent years. TKIDs can offer the MKIDs inherent multiplexibility in the frequency domain, a high spatial resolution comparable with CCDs, and an energy resolution theoretically limited only by thermodynamic fluctuations across the thermal weak links. Microresonators are built in Ti/TiN multilayer technology with the inductive part thermally coupled with a metal absorber on a suspended SiN membrane, to avoid escape of phonons from the film to the substrate. The mid-term goal is to optimize the single-pixel design in terms of superconducting critical temperatures, internal quality factors, kinetic inductance and spectral energy resolution. The final goal is to realize a demonstrator array for a next generation thousand pixels X-ray spectrometer. In this contribution, the status of the project after one year of developments is reported, with detailed reference to the microresonators design and simulations and to the fabrication process.
关键词： Thermal mode,Microwave kinetic inductance detectors,TKID,MKIDs,Thin film,X-ray spectroscopy,Superconducting film,Micromachining,Super-conductive microresonators,Thermal kinetic inductance detectors
更新于2025-09-04 15:30:14