研究目的
To measure the optical constants of TiN and TiN/Ti/TiN multilayer films and design optical stack structures to enhance photon absorption efficiency for microwave kinetic inductance photon-number-resolving detectors.
研究成果
The optical constants of TiN and TiN/Ti/TiN films are successfully determined, enabling the design of optical stacks that can theoretically achieve up to 100% photon absorption at 1550 nm. This enhances the potential for high-efficiency photon-number-resolving detectors, with future work needed for cryogenic validation and implementation.
研究不足
The optical constants are derived from room-temperature measurements, and their behavior at cryogenic temperatures (where detectors operate) is assumed similar but not fully verified. Film thickness dependencies of optical constants are not experimentally investigated and may affect accuracy. The proposed designs are theoretical and require experimental validation at low temperatures.
1：Experimental Design and Method Selection:
The study uses optical transfer matrix theory to derive optical constants from reflectance and transmittance measurements. Thin films are deposited on sapphire substrates, and measurements are performed using a spectrophotometer.
2：Sample Selection and Data Sources:
Stoichiometric TiN and TiN/Ti/TiN multilayer films with thicknesses of 63 nm and 43 nm, respectively, are deposited on 500-μm-thick double-side polished sapphire substrates. Reflectance and transmittance data are collected in the wavelength range of 400 to 2000 nm.
3：List of Experimental Equipment and Materials:
A PerkinElmer LAMBDA 1050 spectrophotometer with a UV/NIS/NIR Universal reflectance accessory and a 3D wideband detector module is used. Materials include TiN, Ti, sapphire substrates, amorphous Si (a-Si), and aluminum (Al).
4：Experimental Procedures and Operational Workflow:
Films are deposited under specific conditions. Reflectance is measured at an 8° incident angle, and transmittance is measured with normal incidence. Data are analyzed using transfer matrix equations to extract n and k values.
5：Data Analysis Methods:
Numerical methods are applied to solve nonlinear equations derived from transfer matrix theory to obtain optical constants. Simulations are conducted to design and optimize optical stack structures for enhanced absorption.
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